Poly vinyl alcohol re-usable masters for microneedle replication

Marco Matteucci; M. Fanetti; M. Casella; F. Gramatica; L. Gavioli; M. Tormen; G. Grenci; F. De Angelis; E. Di Fabrizio

doi:10.1016/j.mee.2009.01.068

Poly vinyl alcohol re-usable masters for microneedle replication

Marco Matteucci^*, M. Fanetti, M. Casella, F. Gramatica, L. Gavioli, M. Tormen, G. Grenci, F. De Angelis, E. Di Fabrizio

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 μm were fabricated through double-exposure deep X-ray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed.

Original language	English (US)
Pages (from-to)	752-756
Number of pages	5
Journal	Microelectronic Engineering
Volume	86
Issue number	4-6
DOIs	https://doi.org/10.1016/j.mee.2009.01.068
State	Published - Apr 2009
Externally published	Yes

Keywords

DXRL
Microneedles
PMMA
PVA
Soft lithography

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.mee.2009.01.068

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@article{b53b9549ef6f47a8acadfa367e233335,

title = "Poly vinyl alcohol re-usable masters for microneedle replication",

abstract = "We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 μm were fabricated through double-exposure deep X-ray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed.",

keywords = "DXRL, Microneedles, PMMA, PVA, Soft lithography",

author = "Marco Matteucci and M. Fanetti and M. Casella and F. Gramatica and L. Gavioli and M. Tormen and G. Grenci and {De Angelis}, F. and {Di Fabrizio}, E.",

year = "2009",

month = apr,

doi = "10.1016/j.mee.2009.01.068",

language = "English (US)",

volume = "86",

pages = "752--756",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "4-6",

}

TY - JOUR

T1 - Poly vinyl alcohol re-usable masters for microneedle replication

AU - Matteucci, Marco

AU - Fanetti, M.

AU - Casella, M.

AU - Gramatica, F.

AU - Gavioli, L.

AU - Tormen, M.

AU - Grenci, G.

AU - De Angelis, F.

AU - Di Fabrizio, E.

PY - 2009/4

Y1 - 2009/4

N2 - We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 μm were fabricated through double-exposure deep X-ray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed.

AB - We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 μm were fabricated through double-exposure deep X-ray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed.

KW - DXRL

KW - Microneedles

KW - PMMA

KW - PVA

KW - Soft lithography

UR - http://www.scopus.com/inward/record.url?scp=67349210360&partnerID=8YFLogxK

U2 - 10.1016/j.mee.2009.01.068

DO - 10.1016/j.mee.2009.01.068

M3 - Article

AN - SCOPUS:67349210360

SN - 0167-9317

VL - 86

SP - 752

EP - 756

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-6

ER -

Poly vinyl alcohol re-usable masters for microneedle replication

Abstract

Keywords

ASJC Scopus subject areas

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