Polydimethylglutarimide (PMGI) as a structural material for surface micromachining

Keyphrases

• Young's Modulus 100%
• Commercially Available 100%
• Structural Materials 100%
• Coefficient of Thermal Expansion 100%
• Surface Micromachining 100%
• Actuator 50%
• Metal Layer 50%
• Micromachining 50%
• Microfabrication 50%
• Deep UV 50%
• Bending Beam 50%
• Thermomechanical Properties 50%
• Active Devices 50%
• Bilayer Lift-off 50%
• Active Structure 50%

Engineering

• Structural Materials 100%
• Young's Modulus 100%
• Coefficient of Thermal Expansion 100%
• Surface Micro-Machining 100%
• Microfabrication 50%
• Metal Layer 50%
• Micro Machining 50%
• Active Device 50%

Material Science

• Building Material 100%
• Micromachining 100%
• Young's Modulus 66%
• Thermal Expansion 66%
• Microfabrication 33%
• Thermomechanical Property 33%
• Actuator 33%