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Prospective technology for system-on-a-chip: N2 implant followed by VHP O2 re-oxidation
T. Y. Luo, H. N. Al-Shareef, Graham Brown, V. H.C. Watt, A. Karamcheti, Marc Jackson, H. R. Huff, B. Evans, C. H. Lee, H. F. Luan, D. L. Kwong
Research output: Contribution to journal › Article › peer-review