Abstract
The author introduces the field of imaging through reactive polymers with emphasis on the macromolecular design, which is necessary to produce industrially useful radiation-sensitive polymers. Several approaches to the introduction of reactive groups into polymer pendant groups or polymer main-chain are presented, and the mechanism of subsequent radiation-induced modification is discussed. A brief introduction to applications in microlithography, holography, information storage and other microelectronics related areas is also included.
Original language | English (US) |
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Pages (from-to) | 307 |
Number of pages | 1 |
Journal | Reactive Polymers |
Volume | 10 |
Issue number | 2-3 |
DOIs | |
State | Published - 1989 |
Externally published | Yes |
Event | Selected Papers Presented at the 4th International Conference on Polymer Supported Reactions in Organic Chemistry - Barcelona, Spain Duration: Jun 26 1988 → Jul 1 1988 |
ASJC Scopus subject areas
- General Engineering