Raman spectroscopy studies of the influence of substrate temperature and ion beam energy on CNx thin films deposited by nitrogen-ion-assisted pulsed laser deposition

Z. M. Ren*, Y. F. Lu, D. H.K. Ho, T. C. Chong, B. A. Cheong, S. I. Pang, J. P. Wang, K. Li

*Corresponding author for this work

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