Abstract
Following design optimization, a rod-type photonic crystal structure is realized using dip-pen nano-lithography. Dots are written by 16-MHA on metal-coated silicon substrate. After dry-etching, SEM images confirm the rod-diameter of ∼250nm and lattice-constant of ∼470nm.
Original language | English (US) |
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Title of host publication | Proceedings 12th International Conference on Fiber Optics and Photonics, Photonics 2014 |
Publisher | Optical Society of America (OSA)[email protected] |
State | Published - Jan 1 2014 |
Externally published | Yes |