Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO2 films via pulsed liquid-injection MOCVD

M. Eleter; S. Daniele; V. Brizé; C. Dubourdieu; C. Lachaud; N. Blasco; A. Pinchart

doi:10.1149/1.3207586

Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO₂ films via pulsed liquid-injection MOCVD

M. Eleter^*, S. Daniele, V. Brizé, C. Dubourdieu, C. Lachaud, N. Blasco, A. Pinchart

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Scopus citations

Abstract

The identification of appropriate ligand-metal combinations, which successfully present the features of: (i) having acceptable melting point, (ii) being more thermally stable than hafnium alkylamides, (iii) having sufficient volatility for vapor phase distribution and (iv) enabling the deposition by liquid-injection MOCVD and ALD of hafnium containing thin films, should go through new generations of well-behaved molecular precursors. We report herein the chemical design of a portfolio of novel mono- and bis-amidinate and guanidinate alkylamide hafnium complexes of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate [R′-N=CX-NR"] _xHf(NR₂)_4-x (R′≠ R" = Et, iPr, tBu; R = Me or Et; X = Me, NMe₂ or NEt₂; x = 1 or 2). We will exemplify the remarkable influence of the molecular structure on the volatility, the thermal stability and the nature (cubic, monoclinic) of HfO ₂ thin films by pulsed liquid-injection MOCVD.

Original language	English (US)
Title of host publication	ECS Transactions - EuroCVD 17/CVD 17
Pages	151-158
Number of pages	8
Edition	8 PART 1
DOIs	https://doi.org/10.1149/1.3207586
State	Published - 2009
Externally published	Yes
Event	17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society - Vienna, Austria Duration: Oct 4 2009 → Oct 9 2009

Publication series

Name	ECS Transactions
Number	8 PART 1
Volume	25
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Other

Other	17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society
Country/Territory	Austria
City	Vienna
Period	10/4/09 → 10/9/09

ASJC Scopus subject areas

General Engineering

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Eleter, M., Daniele, S., Brizé, V., Dubourdieu, C., Lachaud, C., Blasco, N., & Pinchart, A. (2009). Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO₂ films via pulsed liquid-injection MOCVD. In ECS Transactions - EuroCVD 17/CVD 17 (8 PART 1 ed., pp. 151-158). (ECS Transactions; Vol. 25, No. 8 PART 1). https://doi.org/10.1149/1.3207586

Eleter, M. ; Daniele, S. ; Brizé, V. et al. / Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO₂ films via pulsed liquid-injection MOCVD. ECS Transactions - EuroCVD 17/CVD 17. 8 PART 1. ed. 2009. pp. 151-158 (ECS Transactions; 8 PART 1).

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title = "Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO2 films via pulsed liquid-injection MOCVD",

abstract = "The identification of appropriate ligand-metal combinations, which successfully present the features of: (i) having acceptable melting point, (ii) being more thermally stable than hafnium alkylamides, (iii) having sufficient volatility for vapor phase distribution and (iv) enabling the deposition by liquid-injection MOCVD and ALD of hafnium containing thin films, should go through new generations of well-behaved molecular precursors. We report herein the chemical design of a portfolio of novel mono- and bis-amidinate and guanidinate alkylamide hafnium complexes of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate [R′-N=CX-NR{"}] xHf(NR2)4-x (R′≠ R{"} = Et, iPr, tBu; R = Me or Et; X = Me, NMe2 or NEt2; x = 1 or 2). We will exemplify the remarkable influence of the molecular structure on the volatility, the thermal stability and the nature (cubic, monoclinic) of HfO 2 thin films by pulsed liquid-injection MOCVD.",

author = "M. Eleter and S. Daniele and V. Briz{\'e} and C. Dubourdieu and C. Lachaud and N. Blasco and A. Pinchart",

year = "2009",

doi = "10.1149/1.3207586",

language = "English (US)",

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series = "ECS Transactions",

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pages = "151--158",

booktitle = "ECS Transactions - EuroCVD 17/CVD 17",

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note = "17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society ; Conference date: 04-10-2009 Through 09-10-2009",

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Eleter, M, Daniele, S, Brizé, V, Dubourdieu, C, Lachaud, C, Blasco, N & Pinchart, A 2009, Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO₂ films via pulsed liquid-injection MOCVD. in ECS Transactions - EuroCVD 17/CVD 17. 8 PART 1 edn, ECS Transactions, no. 8 PART 1, vol. 25, pp. 151-158, 17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society, Vienna, Austria, 10/4/09. https://doi.org/10.1149/1.3207586

Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO₂ films via pulsed liquid-injection MOCVD. / Eleter, M.; Daniele, S.; Brizé, V. et al.
ECS Transactions - EuroCVD 17/CVD 17. 8 PART 1. ed. 2009. p. 151-158 (ECS Transactions; Vol. 25, No. 8 PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO2 films via pulsed liquid-injection MOCVD

AU - Eleter, M.

AU - Daniele, S.

AU - Brizé, V.

AU - Dubourdieu, C.

AU - Lachaud, C.

AU - Blasco, N.

AU - Pinchart, A.

PY - 2009

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N2 - The identification of appropriate ligand-metal combinations, which successfully present the features of: (i) having acceptable melting point, (ii) being more thermally stable than hafnium alkylamides, (iii) having sufficient volatility for vapor phase distribution and (iv) enabling the deposition by liquid-injection MOCVD and ALD of hafnium containing thin films, should go through new generations of well-behaved molecular precursors. We report herein the chemical design of a portfolio of novel mono- and bis-amidinate and guanidinate alkylamide hafnium complexes of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate [R′-N=CX-NR"] xHf(NR2)4-x (R′≠ R" = Et, iPr, tBu; R = Me or Et; X = Me, NMe2 or NEt2; x = 1 or 2). We will exemplify the remarkable influence of the molecular structure on the volatility, the thermal stability and the nature (cubic, monoclinic) of HfO 2 thin films by pulsed liquid-injection MOCVD.

AB - The identification of appropriate ligand-metal combinations, which successfully present the features of: (i) having acceptable melting point, (ii) being more thermally stable than hafnium alkylamides, (iii) having sufficient volatility for vapor phase distribution and (iv) enabling the deposition by liquid-injection MOCVD and ALD of hafnium containing thin films, should go through new generations of well-behaved molecular precursors. We report herein the chemical design of a portfolio of novel mono- and bis-amidinate and guanidinate alkylamide hafnium complexes of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate [R′-N=CX-NR"] xHf(NR2)4-x (R′≠ R" = Et, iPr, tBu; R = Me or Et; X = Me, NMe2 or NEt2; x = 1 or 2). We will exemplify the remarkable influence of the molecular structure on the volatility, the thermal stability and the nature (cubic, monoclinic) of HfO 2 thin films by pulsed liquid-injection MOCVD.

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DO - 10.1149/1.3207586

M3 - Conference contribution

AN - SCOPUS:76549110028

SN - 9781566777452

T3 - ECS Transactions

SP - 151

EP - 158

BT - ECS Transactions - EuroCVD 17/CVD 17

T2 - 17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society

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Eleter M, Daniele S, Brizé V, Dubourdieu C, Lachaud C, Blasco N et al. Remarkable influence of molecular structure of N,N′-unsymmetrically substituted 1,3-amidinate and 1,3-guanidinate on the volatility and the thermal stability of precursors for HfO₂ films via pulsed liquid-injection MOCVD. In ECS Transactions - EuroCVD 17/CVD 17. 8 PART 1 ed. 2009. p. 151-158. (ECS Transactions; 8 PART 1). doi: 10.1149/1.3207586