Replication of deep x-ray lithography fabricated microstructures through casting of soft material

F. Pérennés; B. Marmiroli; M. Tormen; M. Matteucci; E. Di Fabrizio

doi:10.1117/1.2176730

Replication of deep x-ray lithography fabricated microstructures through casting of soft material

F. Pérennés^*, B. Marmiroli, M. Tormen, M. Matteucci, E. Di Fabrizio

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35:1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20: 1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement.

Original language	English (US)
Article number	011007
Journal	Journal of Microlithography, Microfabrication and Microsystems
Volume	5
Issue number	1
DOIs	https://doi.org/10.1117/1.2176730
State	Published - Jan 2006
Externally published	Yes

Keywords

Deep x-ray lithography
Double casting
High aspect ratio
Polydimethylsiloxane
Polyvinyl alcohol

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1117/1.2176730

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@article{63982e4da7bb4f8989dc6671796913dd,

title = "Replication of deep x-ray lithography fabricated microstructures through casting of soft material",

abstract = "We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35:1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20: 1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement.",

keywords = "Deep x-ray lithography, Double casting, High aspect ratio, Polydimethylsiloxane, Polyvinyl alcohol",

author = "F. P{\'e}renn{\'e}s and B. Marmiroli and M. Tormen and M. Matteucci and {Di Fabrizio}, E.",

year = "2006",

month = jan,

doi = "10.1117/1.2176730",

language = "English (US)",

volume = "5",

journal = "Journal of Microlithography, Microfabrication and Microsystems",

issn = "1537-1646",

publisher = "Society of Photo-optical Instrumentation Engineers",

number = "1",

}

TY - JOUR

T1 - Replication of deep x-ray lithography fabricated microstructures through casting of soft material

AU - Pérennés, F.

AU - Marmiroli, B.

AU - Tormen, M.

AU - Matteucci, M.

AU - Di Fabrizio, E.

PY - 2006/1

Y1 - 2006/1

N2 - We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35:1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20: 1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement.

AB - We introduce simple double-casting replication methods for high-aspect-ratio microstructures fabricated by deep x-ray lithography using intermediate molds of soft materials. Two types of soft material are investigated. The ability to fabricate polymethylsiloxane (PDMS) molds with well-type structures with aspect ratios up to 35:1 is demonstrated for structure densities below 50%, and the reproduction from this mold of pillar-type polymethyl methacrylate (PMMA) structures with aspect ratios of 20: 1 is achieved. Polyvinyl alcohol (PVA), a water soluble polymer, is also tested as a sacrificial intermediate mold and successfully used for the replication of structures with aspect ratios up to 5:1. Double-casting replication methods are described and discussed for their potential improvement.

KW - Deep x-ray lithography

KW - Double casting

KW - High aspect ratio

KW - Polydimethylsiloxane

KW - Polyvinyl alcohol

UR - http://www.scopus.com/inward/record.url?scp=33344466267&partnerID=8YFLogxK

U2 - 10.1117/1.2176730

DO - 10.1117/1.2176730

M3 - Article

AN - SCOPUS:33344466267

SN - 1537-1646

VL - 5

JO - Journal of Microlithography, Microfabrication and Microsystems

JF - Journal of Microlithography, Microfabrication and Microsystems

IS - 1

M1 - 011007

ER -

Replication of deep x-ray lithography fabricated microstructures through casting of soft material

Abstract

Keywords

ASJC Scopus subject areas

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