Resist materials

Scott A. MacDonald; Jean Frechet; Hiroshi Ito; C. Grant Willson

doi:10.1016/0167-9317(85)90037-1

Resist materials

Scott A. MacDonald^*, Jean Frechet, Hiroshi Ito, C. Grant Willson

^*Corresponding author for this work

Physical Sciences and Engineering

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Original language	English (US)
Pages (from-to)	277-278
Number of pages	2
Journal	Microelectronic Engineering
Volume	3
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(85)90037-1
State	Published - Jan 1 1985

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/0167-9317(85)90037-1

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title = "Resist materials",

author = "MacDonald, {Scott A.} and Jean Frechet and Hiroshi Ito and {Grant Willson}, C.",

year = "1985",

month = jan,

day = "1",

doi = "10.1016/0167-9317(85)90037-1",

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journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "ELSEVIER SCIENCE BV",

number = "1-4",

}

TY - JOUR

T1 - Resist materials

AU - MacDonald, Scott A.

AU - Frechet, Jean

AU - Ito, Hiroshi

AU - Grant Willson, C.

PY - 1985/1/1

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DO - 10.1016/0167-9317(85)90037-1

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SN - 0167-9317

VL - 3

SP - 277

EP - 278

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-4

ER -

Resist materials

ASJC Scopus subject areas

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