Response of an electrostatically actuated microbeam to drop-table test

Keyphrases

• Electrostatically Actuated Microbeam 100%
• Test Table 100%
• Electrostatic Force 40%
• Microbeam 40%
• Mechanical Shock 40%
• Micromachining 20%
• Dynamic Pull-in 20%
• Reduced Order Model 20%
• Euler-Bernoulli Beam 20%
• Cantilever Beam 20%
• Shock 20%
• Electrostatic Loading 20%
• Cantilever Microbeam 20%
• Electrostatic Voltage 20%
• Pull-in Instability 20%
• Combined Shock 20%
• Shock Force 20%
• Shock Pulse 20%
• Shock Testing 20%
• Testing Equipment 20%

Engineering

• Electrostatics 100%
• Mechanical Shock 40%
• Simulation Result 20%
• Theoretical Investigation 20%
• Experimental Investigation 20%
• Reduced Order Model 20%
• Cantilever Beam 20%
• Combined Effect 20%
• Beam Model 20%
• Shock Testing 20%
• Bernoulli Beam 20%