TY - JOUR
T1 - Revealing microstructure and dislocation behavior in BAlN/AlGaN heterostructures
AU - Sun, Haiding
AU - Wu, Feng
AU - Park, Young Jae
AU - Al tahtamouni, T. M.
AU - Liao, Che-Hao
AU - Guo, Wenzhe
AU - Alfaraj, Nasir
AU - Li, Kuang-Hui
AU - Anjum, Dalaver H.
AU - Detchprohm, Theeradetch
AU - Dupuis, Russell D.
AU - Li, Xiaohang
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledged KAUST grant number(s): REP/1/3189-01-01, BAS/1/1664-01-01, BAS/1/1664-01-07, GCC-2017-007
Acknowledgements: The KAUST authors acknowledge the support of the GCC Research Program REP/1/3189-01-01, Baseline BAS/1/1664-01-01, and Equipment BAS/1/1664-01-07. The work at QU was supported by the GCC Research Program GCC-2017-007. The work at the Georgia Institute of Technology was supported in part by DARPA under Grant No. W911NF-15-1-0026 and NSF under Grant No. DMR-1410874. R.D.D. acknowledges the additional support of the Steve W. Chaddick Endowed Chair in Electro-Optics and Georgia Research Alliance.
PY - 2017/12/18
Y1 - 2017/12/18
N2 - We reveal the microstructure and dislocation behavior in 20-pair B0.14Al0.86N/Al0.70Ga0.30N multiple-stack heterostructures (MSHs) exhibiting an increasing dislocation density along the c-axis, which is attributed to the continuous generation of dislocations (edge and mixed-type) within the individual B0.14Al0.86N layers. At the MSH interfaces, the threading dislocations were accompanied by a string of V-shape pits extending to the surface, leading to interface roughening and the formation of surface columnar features. Strain maps indicated an approximately 1.5% tensile strain and 1% compressive strain in the B0.14Al0.86N and Al0.70Ga0.30N layers, respectively. Twin structures were observed, and the MSH eventually changed from monocrystalline to polycrystalline.
AB - We reveal the microstructure and dislocation behavior in 20-pair B0.14Al0.86N/Al0.70Ga0.30N multiple-stack heterostructures (MSHs) exhibiting an increasing dislocation density along the c-axis, which is attributed to the continuous generation of dislocations (edge and mixed-type) within the individual B0.14Al0.86N layers. At the MSH interfaces, the threading dislocations were accompanied by a string of V-shape pits extending to the surface, leading to interface roughening and the formation of surface columnar features. Strain maps indicated an approximately 1.5% tensile strain and 1% compressive strain in the B0.14Al0.86N and Al0.70Ga0.30N layers, respectively. Twin structures were observed, and the MSH eventually changed from monocrystalline to polycrystalline.
UR - http://hdl.handle.net/10754/626578
UR - http://iopscience.iop.org/article/10.7567/APEX.11.011001/meta
UR - http://www.scopus.com/inward/record.url?scp=85040022105&partnerID=8YFLogxK
U2 - 10.7567/APEX.11.011001
DO - 10.7567/APEX.11.011001
M3 - Article
SN - 1882-0778
VL - 11
SP - 011001
JO - Applied Physics Express
JF - Applied Physics Express
IS - 1
ER -