RF magnetron sputter-deposition of La0.5Sr0.5CoO3//Pt composite electrodes for Pb(Zr,Ti)O3 thin film capacitors

M. V. Raymond; H. N. Al-Shareef; B. A. Tuttle; D. Dimos; J. T. Evans

doi:10.1557/proc-433-145

RF magnetron sputter-deposition of La_0.5Sr_0.5CoO₃//Pt composite electrodes for Pb(Zr,Ti)O₃ thin film capacitors

M. V. Raymond^*, H. N. Al-Shareef, B. A. Tuttle, D. Dimos, J. T. Evans

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

6 Scopus citations

Abstract

La_0.5Sr_0.5CoO₃ (LSCO) thin films have been deposited, using RF magnetron sputter-deposition for use as an electrode material for Pb(Zr,Ti)O₃ (PZT) thin film capacitors. The effect of the O₂:Ar sputter gas ratio during deposition, on the LSCO film properties was investigated. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O₂:Ar ratio was increased for both the as-deposited and annealed films. In addition, it was found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers will be discussed.

Original language	English (US)
Pages (from-to)	145-150
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	433
DOIs	https://doi.org/10.1557/proc-433-145
State	Published - 1996
Externally published	Yes
Event	Proceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA Duration: Apr 7 1996 → Apr 12 1996

ASJC Scopus subject areas

Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
General Materials Science

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@article{04c0fe20e7524789a9ccc513033f8aaa,

title = "RF magnetron sputter-deposition of La0.5Sr0.5CoO3//Pt composite electrodes for Pb(Zr,Ti)O3 thin film capacitors",

abstract = "La0.5Sr0.5CoO3 (LSCO) thin films have been deposited, using RF magnetron sputter-deposition for use as an electrode material for Pb(Zr,Ti)O3 (PZT) thin film capacitors. The effect of the O2:Ar sputter gas ratio during deposition, on the LSCO film properties was investigated. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O2:Ar ratio was increased for both the as-deposited and annealed films. In addition, it was found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers will be discussed.",

author = "Raymond, {M. V.} and Al-Shareef, {H. N.} and Tuttle, {B. A.} and D. Dimos and Evans, {J. T.}",

year = "1996",

doi = "10.1557/proc-433-145",

language = "English (US)",

volume = "433",

pages = "145--150",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1996 MRS Spring Symposium ; Conference date: 07-04-1996 Through 12-04-1996",

}

TY - JOUR

T1 - RF magnetron sputter-deposition of La0.5Sr0.5CoO3//Pt composite electrodes for Pb(Zr,Ti)O3 thin film capacitors

AU - Raymond, M. V.

AU - Al-Shareef, H. N.

AU - Tuttle, B. A.

AU - Dimos, D.

AU - Evans, J. T.

PY - 1996

Y1 - 1996

N2 - La0.5Sr0.5CoO3 (LSCO) thin films have been deposited, using RF magnetron sputter-deposition for use as an electrode material for Pb(Zr,Ti)O3 (PZT) thin film capacitors. The effect of the O2:Ar sputter gas ratio during deposition, on the LSCO film properties was investigated. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O2:Ar ratio was increased for both the as-deposited and annealed films. In addition, it was found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers will be discussed.

AB - La0.5Sr0.5CoO3 (LSCO) thin films have been deposited, using RF magnetron sputter-deposition for use as an electrode material for Pb(Zr,Ti)O3 (PZT) thin film capacitors. The effect of the O2:Ar sputter gas ratio during deposition, on the LSCO film properties was investigated. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O2:Ar ratio was increased for both the as-deposited and annealed films. In addition, it was found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers will be discussed.

UR - http://www.scopus.com/inward/record.url?scp=0030389545&partnerID=8YFLogxK

U2 - 10.1557/proc-433-145

DO - 10.1557/proc-433-145

M3 - Conference article

AN - SCOPUS:0030389545

SN - 0272-9172

VL - 433

SP - 145

EP - 150

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Spring Symposium

Y2 - 7 April 1996 through 12 April 1996

ER -

RF magnetron sputter-deposition of La_0.5Sr_0.5CoO₃//Pt composite electrodes for Pb(Zr,Ti)O₃ thin film capacitors

Abstract

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