Abstract
A high-Î- zirconium oxide gate dielectric is fabricated using a solution-based process at room temperature. UV irradiation decomposes and oxidizes a zirconium-based gel film, which densifies into an ultrathin (
Original language | English (US) |
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Pages (from-to) | 971-974 |
Number of pages | 4 |
Journal | Advanced Materials |
Volume | 23 |
Issue number | 8 |
DOIs | |
State | Published - Feb 22 2011 |
Externally published | Yes |
ASJC Scopus subject areas
- Mechanics of Materials
- General Materials Science
- Mechanical Engineering