Room to high temperature measurements of flexible SOI FinFETs with sub-20-nm fins

Amer El Hajj Diab, Galo T. Sevilla, Sorin Cristoloveanu, Muhammad Mustafa Hussain

Research output: Contribution to journalArticlepeer-review

21 Scopus citations


We report the temperature dependence of the core electrical parameters and transport characteristics of a flexible version of fin field-effect transistor (FinFET) on silicon-on-insulator (SOI) with sub-20-nm wide fins and high-k/metal gate-stacks. For the first time, we characterize them from room to high temperature (150 °C) to show the impact of temperature variation on drain current, gate leakage current, and transconductance. Variation of extracted parameters, such as low-field mobility, subthreshold swing, threshold voltage, and ON-OFF current characteristics, is reported too. Direct comparison is made to a rigid version of the SOI FinFETs. The mobility degradation with temperature is mainly caused by phonon scattering mechanism. The overall excellent devices performance at high temperature after release is outlined proving the suitability of truly high-performance flexible inorganic electronics with such advanced architecture.
Original languageEnglish (US)
Pages (from-to)3978-3984
Number of pages7
JournalIEEE Transactions on Electron Devices
Issue number12
StatePublished - Dec 2014

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


Dive into the research topics of 'Room to high temperature measurements of flexible SOI FinFETs with sub-20-nm fins'. Together they form a unique fingerprint.

Cite this