Selective laser etching or ablation for fabrication of devices

Ulrich Buttner (Inventor), Khaled N. Salama (Inventor), Christos Sapsanis (Inventor)

Research output: Patent


Methods of fabricating devices vial selective laser etching are provided. The methods can include selective laser etching of a portion of a metal layer, e.g. using a laser light source having a wavelength of 1,000 nm to 1,500 nm. The methods can be used to fabricate a variety of features, including an electrode, an interconnect, a channel, a reservoir, a contact hole, a trench, a pad, or a combination thereof. A variety of devices fabricated according to the methods are also provided. In some aspects, capacitive humidity sensors are provided that can be fabricated according to the provided methods. The capacitive humidity sensors can be fabricated with intricate electrodes, e.g. having a fractal pattern such as a Peano curve, a Hilbert curve, a Moore curve, or a combination thereof.
Original languageEnglish (US)
Patent numberWO 2017006233 A1
StatePublished - Jan 12 2017


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