Abstract
The design of sequential turret source-masking system for used in the fabrication of multilayer structures is studied. The system's component parts include: the masking system, the driving shaft connecting the four position turret source with the support plate, and the four position turret. The system in operation has produced samples with excellent dimensional accuracy operating satisfactorily up to designed temperatures.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2595-2596 |
| Number of pages | 2 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 18 |
| Issue number | 5 |
| DOIs | |
| State | Published - Sep 2000 |
| Externally published | Yes |
| Event | 47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing - Boston, USA Duration: Oct 2 2000 → Oct 6 2000 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films