Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+

Armando Arpys Arevalo Carreno; David Conchouso Gonzalez; Amir Omar Zaher; Ian G. Foulds; Jürgen Kosel

doi:10.1109/UKSim.2013.41

Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+

Armando Arpys Arevalo Carreno, David Conchouso Gonzalez, Amir Omar Zaher, Ian G. Foulds, Jürgen Kosel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study consists of a modal analysis of the modeled accelerometer, a study relating capacitance to acceleration, capacitance to deflection, an effective spring constant calculation, and a comparison of results achieved using CoventorWare® ANALYZER™ and MEMS+®. A fabricated energy harvester design from [1] was used for modeling and simulation in this study, with a four spring attachment of a 650μm×650μm; ×110μm proof mass of 4.542×10-8 kg. At rest, the spacing between electrodes is 4μm along the z-axis, and at 1.5g acceleration, there is 1.9μm spacing between electrodes, at which point pull in occurs for a 1V voltage. © 2013 IEEE.

Original language	English (US)
Title of host publication	2013 UKSim 15th International Conference on Computer Modelling and Simulation
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	792-797
Number of pages	6
ISBN (Print)	9780769549941
DOIs	https://doi.org/10.1109/UKSim.2013.41
State	Published - Apr 2013

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10.1109/UKSim.2013.41

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title = "Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+",

abstract = "This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study consists of a modal analysis of the modeled accelerometer, a study relating capacitance to acceleration, capacitance to deflection, an effective spring constant calculation, and a comparison of results achieved using CoventorWare{\textregistered} ANALYZER{\texttrademark} and MEMS+{\textregistered}. A fabricated energy harvester design from [1] was used for modeling and simulation in this study, with a four spring attachment of a 650μm×650μm; ×110μm proof mass of 4.542×10-8 kg. At rest, the spacing between electrodes is 4μm along the z-axis, and at 1.5g acceleration, there is 1.9μm spacing between electrodes, at which point pull in occurs for a 1V voltage. {\textcopyright} 2013 IEEE.",

author = "Carreno, {Armando Arpys Arevalo} and {Conchouso Gonzalez}, David and Zaher, {Amir Omar} and Foulds, {Ian G.} and J{\"u}rgen Kosel",

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doi = "10.1109/UKSim.2013.41",

language = "English (US)",

isbn = "9780769549941",

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Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+. / Carreno, Armando Arpys Arevalo; Conchouso Gonzalez, David; Zaher, Amir Omar et al.
2013 UKSim 15th International Conference on Computer Modelling and Simulation. Institute of Electrical and Electronics Engineers (IEEE), 2013. p. 792-797.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+

AU - Carreno, Armando Arpys Arevalo

AU - Conchouso Gonzalez, David

AU - Zaher, Amir Omar

AU - Foulds, Ian G.

AU - Kosel, Jürgen

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2013/4

Y1 - 2013/4

N2 - This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study consists of a modal analysis of the modeled accelerometer, a study relating capacitance to acceleration, capacitance to deflection, an effective spring constant calculation, and a comparison of results achieved using CoventorWare® ANALYZER™ and MEMS+®. A fabricated energy harvester design from [1] was used for modeling and simulation in this study, with a four spring attachment of a 650μm×650μm; ×110μm proof mass of 4.542×10-8 kg. At rest, the spacing between electrodes is 4μm along the z-axis, and at 1.5g acceleration, there is 1.9μm spacing between electrodes, at which point pull in occurs for a 1V voltage. © 2013 IEEE.

AB - This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study consists of a modal analysis of the modeled accelerometer, a study relating capacitance to acceleration, capacitance to deflection, an effective spring constant calculation, and a comparison of results achieved using CoventorWare® ANALYZER™ and MEMS+®. A fabricated energy harvester design from [1] was used for modeling and simulation in this study, with a four spring attachment of a 650μm×650μm; ×110μm proof mass of 4.542×10-8 kg. At rest, the spacing between electrodes is 4μm along the z-axis, and at 1.5g acceleration, there is 1.9μm spacing between electrodes, at which point pull in occurs for a 1V voltage. © 2013 IEEE.

UR - http://hdl.handle.net/10754/564692

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DO - 10.1109/UKSim.2013.41

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BT - 2013 UKSim 15th International Conference on Computer Modelling and Simulation

PB - Institute of Electrical and Electronics Engineers (IEEE)

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Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+

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