Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+

Armando Arpys Arevalo Carreno, David Conchouso Gonzalez, Amir Omar Zaher, Ian G. Foulds, Jürgen Kosel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations


This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study consists of a modal analysis of the modeled accelerometer, a study relating capacitance to acceleration, capacitance to deflection, an effective spring constant calculation, and a comparison of results achieved using CoventorWare® ANALYZER™ and MEMS+®. A fabricated energy harvester design from [1] was used for modeling and simulation in this study, with a four spring attachment of a 650μm×650μm; ×110μm proof mass of 4.542×10-8 kg. At rest, the spacing between electrodes is 4μm along the z-axis, and at 1.5g acceleration, there is 1.9μm spacing between electrodes, at which point pull in occurs for a 1V voltage. © 2013 IEEE.
Original languageEnglish (US)
Title of host publication2013 UKSim 15th International Conference on Computer Modelling and Simulation
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages6
ISBN (Print)9780769549941
StatePublished - Apr 2013


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