Soft x-ray submicron imaging detector based on point defects in LiF

G. Baldacchini; S. Bollanti; F. Bonfigli; F. Flora; P. Di Lazzaro; A. Lai; T. Marolo; R. M. Montereali; D. Murra; A. Faenov; T. Pikuz; E. Nichelatti; G. Tomassetti; A. Reale; L. Reale; A. Ritucci; T. Limongi; L. Palladino; M. Francucci; S. Martellucci; G. Petrocelli

doi:10.1063/1.2130930

Soft x-ray submicron imaging detector based on point defects in LiF

G. Baldacchini, S. Bollanti, F. Bonfigli, F. Flora^*, P. Di Lazzaro, A. Lai, T. Marolo, R. M. Montereali, D. Murra, A. Faenov, T. Pikuz, E. Nichelatti, G. Tomassetti, A. Reale, L. Reale, A. Ritucci, T. Limongi, L. Palladino, M. Francucci, S. MartellucciG. Petrocelli

^*Corresponding author for this work

Research output: Contribution to journal › Review article › peer-review

99 Scopus citations

Abstract

The use of lithium fluoride (LiF) crystals and films as imaging detectors for EUV and soft-x-ray radiation is discussed. The EUV or soft-x-ray radiation can generate stable color centers, emitting in the visible spectral range an intense fluorescence from the exposed areas. The high dynamic response of the material to the received dose and the atomic scale of the color centers make this detector extremely interesting for imaging at a spatial resolution which can be much smaller than the light wavelength. Experimental results of contact microscopy imaging of test meshes demonstrate a resolution of the order of 400 nm. This high spatial resolution has been obtained in a wide field of view, up to several mm2. Images obtained on different biological samples, as well as an investigation of a soft x-ray laser beam are presented. The behavior of the generated color centers density as a function of the deposited x-ray dose and the advantages of this new diagnostic technique for both coherent and noncoherent EUV sources, compared with CCDs detectors, photographic films, and photoresists are discussed.

Original language	English (US)
Article number	113104
Pages (from-to)	1-12
Number of pages	12
Journal	Review of Scientific Instruments
Volume	76
Issue number	11
DOIs	https://doi.org/10.1063/1.2130930
State	Published - 2005
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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Baldacchini, G., Bollanti, S., Bonfigli, F., Flora, F., Di Lazzaro, P., Lai, A., Marolo, T., Montereali, R. M., Murra, D., Faenov, A., Pikuz, T., Nichelatti, E., Tomassetti, G., Reale, A., Reale, L., Ritucci, A., Limongi, T., Palladino, L., Francucci, M., ... Petrocelli, G. (2005). Soft x-ray submicron imaging detector based on point defects in LiF. Review of Scientific Instruments, 76(11), 1-12. Article 113104. https://doi.org/10.1063/1.2130930

@article{913be96d9f574dd9a538f1961ee0f37a,

title = "Soft x-ray submicron imaging detector based on point defects in LiF",

abstract = "The use of lithium fluoride (LiF) crystals and films as imaging detectors for EUV and soft-x-ray radiation is discussed. The EUV or soft-x-ray radiation can generate stable color centers, emitting in the visible spectral range an intense fluorescence from the exposed areas. The high dynamic response of the material to the received dose and the atomic scale of the color centers make this detector extremely interesting for imaging at a spatial resolution which can be much smaller than the light wavelength. Experimental results of contact microscopy imaging of test meshes demonstrate a resolution of the order of 400 nm. This high spatial resolution has been obtained in a wide field of view, up to several mm2. Images obtained on different biological samples, as well as an investigation of a soft x-ray laser beam are presented. The behavior of the generated color centers density as a function of the deposited x-ray dose and the advantages of this new diagnostic technique for both coherent and noncoherent EUV sources, compared with CCDs detectors, photographic films, and photoresists are discussed.",

author = "G. Baldacchini and S. Bollanti and F. Bonfigli and F. Flora and {Di Lazzaro}, P. and A. Lai and T. Marolo and Montereali, {R. M.} and D. Murra and A. Faenov and T. Pikuz and E. Nichelatti and G. Tomassetti and A. Reale and L. Reale and A. Ritucci and T. Limongi and L. Palladino and M. Francucci and S. Martellucci and G. Petrocelli",

year = "2005",

doi = "10.1063/1.2130930",

language = "English (US)",

volume = "76",

pages = "1--12",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "AIP Publishing",

number = "11",

}

Baldacchini, G, Bollanti, S, Bonfigli, F, Flora, F, Di Lazzaro, P, Lai, A, Marolo, T, Montereali, RM, Murra, D, Faenov, A, Pikuz, T, Nichelatti, E, Tomassetti, G, Reale, A, Reale, L, Ritucci, A, Limongi, T, Palladino, L, Francucci, M, Martellucci, S & Petrocelli, G 2005, 'Soft x-ray submicron imaging detector based on point defects in LiF', Review of Scientific Instruments, vol. 76, no. 11, 113104, pp. 1-12. https://doi.org/10.1063/1.2130930

TY - JOUR

T1 - Soft x-ray submicron imaging detector based on point defects in LiF

AU - Baldacchini, G.

AU - Bollanti, S.

AU - Bonfigli, F.

AU - Flora, F.

AU - Di Lazzaro, P.

AU - Lai, A.

AU - Marolo, T.

AU - Montereali, R. M.

AU - Murra, D.

AU - Faenov, A.

AU - Pikuz, T.

AU - Nichelatti, E.

AU - Tomassetti, G.

AU - Reale, A.

AU - Reale, L.

AU - Ritucci, A.

AU - Limongi, T.

AU - Palladino, L.

AU - Francucci, M.

AU - Martellucci, S.

AU - Petrocelli, G.

PY - 2005

Y1 - 2005

N2 - The use of lithium fluoride (LiF) crystals and films as imaging detectors for EUV and soft-x-ray radiation is discussed. The EUV or soft-x-ray radiation can generate stable color centers, emitting in the visible spectral range an intense fluorescence from the exposed areas. The high dynamic response of the material to the received dose and the atomic scale of the color centers make this detector extremely interesting for imaging at a spatial resolution which can be much smaller than the light wavelength. Experimental results of contact microscopy imaging of test meshes demonstrate a resolution of the order of 400 nm. This high spatial resolution has been obtained in a wide field of view, up to several mm2. Images obtained on different biological samples, as well as an investigation of a soft x-ray laser beam are presented. The behavior of the generated color centers density as a function of the deposited x-ray dose and the advantages of this new diagnostic technique for both coherent and noncoherent EUV sources, compared with CCDs detectors, photographic films, and photoresists are discussed.

AB - The use of lithium fluoride (LiF) crystals and films as imaging detectors for EUV and soft-x-ray radiation is discussed. The EUV or soft-x-ray radiation can generate stable color centers, emitting in the visible spectral range an intense fluorescence from the exposed areas. The high dynamic response of the material to the received dose and the atomic scale of the color centers make this detector extremely interesting for imaging at a spatial resolution which can be much smaller than the light wavelength. Experimental results of contact microscopy imaging of test meshes demonstrate a resolution of the order of 400 nm. This high spatial resolution has been obtained in a wide field of view, up to several mm2. Images obtained on different biological samples, as well as an investigation of a soft x-ray laser beam are presented. The behavior of the generated color centers density as a function of the deposited x-ray dose and the advantages of this new diagnostic technique for both coherent and noncoherent EUV sources, compared with CCDs detectors, photographic films, and photoresists are discussed.

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U2 - 10.1063/1.2130930

DO - 10.1063/1.2130930

M3 - Review article

AN - SCOPUS:28444499734

SN - 0034-6748

VL - 76

SP - 1

EP - 12

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 11

M1 - 113104

ER -

Soft x-ray submicron imaging detector based on point defects in LiF

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