Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups

Li Li; Souvik Chakrabarty; Jing Jiang; Ben Zhang; Christopher Ober; Emmanuel P. Giannelis

doi:10.1039/c5nr07334k

Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups

Li Li, Souvik Chakrabarty, Jing Jiang, Ben Zhang, Christopher Ober, Emmanuel P. Giannelis

Research output: Contribution to journal › Article › peer-review

54 Scopus citations

Abstract

© 2016 The Royal Society of Chemistry. The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail. The nanoparticles regardless of core or ligand chemistry have a hydrodynamic diameter of 2-3 nm and a very narrow size distribution in organic solvents. The Hansen solubility parameters for nanoparticles functionalized with IBA and 2MBA have the highest contribution from the dispersion interaction than those with tDMA and MAA, which show more polar character. The nanoparticles functionalized with unsaturated surface ligands showed more apparent solubility changes after exposure to DUV than those with saturated ones. The solubility differences after exposure are more pronounced for films containing a higher amount of photoacid generator. The work reported here provides material selection criteria and processing strategies for the design of high performance EUV photoresists.

Original language	English (US)
Pages (from-to)	1338-1343
Number of pages	6
Journal	Nanoscale
Volume	8
Issue number	3
DOIs	https://doi.org/10.1039/c5nr07334k
State	Published - 2016
Externally published	Yes

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@article{5ea3184cdd2a4173b1217c8cd2711d51,

title = "Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups",

abstract = "{\textcopyright} 2016 The Royal Society of Chemistry. The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail. The nanoparticles regardless of core or ligand chemistry have a hydrodynamic diameter of 2-3 nm and a very narrow size distribution in organic solvents. The Hansen solubility parameters for nanoparticles functionalized with IBA and 2MBA have the highest contribution from the dispersion interaction than those with tDMA and MAA, which show more polar character. The nanoparticles functionalized with unsaturated surface ligands showed more apparent solubility changes after exposure to DUV than those with saturated ones. The solubility differences after exposure are more pronounced for films containing a higher amount of photoacid generator. The work reported here provides material selection criteria and processing strategies for the design of high performance EUV photoresists.",

author = "Li Li and Souvik Chakrabarty and Jing Jiang and Ben Zhang and Christopher Ober and Giannelis, {Emmanuel P.}",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: The authors gratefully acknowledge funding support from SEMATECH and facilities support from Lawrence Berkeley National Laboratory (LBNL), Cornell Nanoscale Science and Technology (CNF), the Cornell Center for Materials Research (CCMR) and the KAUST-Cornell Center of Energy and Sustainability (KAUST-CU). This publication acknowledges KAUST support, but has no KAUST affiliated authors.",

year = "2016",

doi = "10.1039/c5nr07334k",

language = "English (US)",

volume = "8",

pages = "1338--1343",

journal = "Nanoscale",

issn = "2040-3364",

publisher = "Royal Society of Chemistry",

number = "3",

}

TY - JOUR

T1 - Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups

AU - Li, Li

AU - Chakrabarty, Souvik

AU - Jiang, Jing

AU - Zhang, Ben

AU - Ober, Christopher

AU - Giannelis, Emmanuel P.

N1 - KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: The authors gratefully acknowledge funding support from SEMATECH and facilities support from Lawrence Berkeley National Laboratory (LBNL), Cornell Nanoscale Science and Technology (CNF), the Cornell Center for Materials Research (CCMR) and the KAUST-Cornell Center of Energy and Sustainability (KAUST-CU). This publication acknowledges KAUST support, but has no KAUST affiliated authors.

PY - 2016

Y1 - 2016

N2 - © 2016 The Royal Society of Chemistry. The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail. The nanoparticles regardless of core or ligand chemistry have a hydrodynamic diameter of 2-3 nm and a very narrow size distribution in organic solvents. The Hansen solubility parameters for nanoparticles functionalized with IBA and 2MBA have the highest contribution from the dispersion interaction than those with tDMA and MAA, which show more polar character. The nanoparticles functionalized with unsaturated surface ligands showed more apparent solubility changes after exposure to DUV than those with saturated ones. The solubility differences after exposure are more pronounced for films containing a higher amount of photoacid generator. The work reported here provides material selection criteria and processing strategies for the design of high performance EUV photoresists.

AB - © 2016 The Royal Society of Chemistry. The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail. The nanoparticles regardless of core or ligand chemistry have a hydrodynamic diameter of 2-3 nm and a very narrow size distribution in organic solvents. The Hansen solubility parameters for nanoparticles functionalized with IBA and 2MBA have the highest contribution from the dispersion interaction than those with tDMA and MAA, which show more polar character. The nanoparticles functionalized with unsaturated surface ligands showed more apparent solubility changes after exposure to DUV than those with saturated ones. The solubility differences after exposure are more pronounced for films containing a higher amount of photoacid generator. The work reported here provides material selection criteria and processing strategies for the design of high performance EUV photoresists.

UR - http://hdl.handle.net/10754/599658

UR - http://xlink.rsc.org/?DOI=C5NR07334K

UR - http://www.scopus.com/inward/record.url?scp=84954130141&partnerID=8YFLogxK

U2 - 10.1039/c5nr07334k

DO - 10.1039/c5nr07334k

M3 - Article

C2 - 26695121

SN - 2040-3364

VL - 8

SP - 1338

EP - 1343

JO - Nanoscale

JF - Nanoscale

IS - 3

ER -

Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups

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