SrRuO3 thin films grown on MgO substrates at different oxygen partial pressures

Bin Zou; Peter K. Petrov; Neil McN. Alford

doi:10.1557/jmr.2012.409

SrRuO3 thin films grown on MgO substrates at different oxygen partial pressures

Bin Zou, Peter K. Petrov, Neil McN. Alford

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Abstract

A comprehensive study of SrRuO3 thin films growth on (001) MgO substrates by pulsed laser deposition in a wide oxygen pressure range from 10 to 300 mTorr was carried out. The experimental results showed a correlation between the lattice constants, resistivity, and oxygen partial pressures used. Ru deficiency detected only in films deposited at lower oxygen pressures (

Original language	English (US)
Pages (from-to)	702-707
Number of pages	6
Journal	Journal of Materials Research
Volume	28
Issue number	5
DOIs	https://doi.org/10.1557/jmr.2012.409
State	Published - Jan 8 2013
Externally published	Yes

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10.1557/jmr.2012.409

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abstract = "A comprehensive study of SrRuO3 thin films growth on (001) MgO substrates by pulsed laser deposition in a wide oxygen pressure range from 10 to 300 mTorr was carried out. The experimental results showed a correlation between the lattice constants, resistivity, and oxygen partial pressures used. Ru deficiency detected only in films deposited at lower oxygen pressures (",

author = "Bin Zou and Petrov, {Peter K.} and Alford, {Neil McN.}",

note = "KAUST Repository Item: Exported on 2020-10-01 Acknowledgements: We acknowledge the financial support from theEngineering and Physical Sciences Research Counciland the King Abdullah University of Science andTechnology. This publication acknowledges KAUST support, but has no KAUST affiliated authors.",

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AU - Alford, Neil McN.

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N2 - A comprehensive study of SrRuO3 thin films growth on (001) MgO substrates by pulsed laser deposition in a wide oxygen pressure range from 10 to 300 mTorr was carried out. The experimental results showed a correlation between the lattice constants, resistivity, and oxygen partial pressures used. Ru deficiency detected only in films deposited at lower oxygen pressures (

AB - A comprehensive study of SrRuO3 thin films growth on (001) MgO substrates by pulsed laser deposition in a wide oxygen pressure range from 10 to 300 mTorr was carried out. The experimental results showed a correlation between the lattice constants, resistivity, and oxygen partial pressures used. Ru deficiency detected only in films deposited at lower oxygen pressures (

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SrRuO3 thin films grown on MgO substrates at different oxygen partial pressures

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