TY - JOUR
T1 - Steam-Assisted Chemical Vapor Deposition of Zeolitic Imidazolate Framework
AU - Huang, Jing-Kai
AU - Saito, Noboru
AU - Cai, Yichen
AU - Wan, Yi
AU - Cheng, Chia-Chin
AU - Li, Mengliu
AU - Shi, Junjie
AU - Tamada, Kaoru
AU - Tung, Vincent
AU - Li, Sean
AU - Li, Lain-Jong
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: The authors acknowledge the facilities, as well as the scientific and technical assistance, from the NSW Node of the Australian
National Fabrication Facility (ANFF) and the Research & Prototype Foundry Core Research Facility at the University of Sydney, part of the ANFF. The authors also thank the Electron Microscope Unit within the Mark Wainwright Analytical Centre at UNSW Sydney for the use of facilities. N.S. is grateful to the advanced graduate course on molecular systems for devices, a program for leading graduate schools, Kyushu University, Japan.
PY - 2020/4/1
Y1 - 2020/4/1
N2 - Direct growth of metal–organic frameworks (MOFs) on substrates is a prerequisite to incorporating them into functional platforms and microdevices. Nevertheless, available reports mostly rely on the solvent-based routes, typically altered from processes for powder synthesis which are obstacles to the nanofabrication. Besides, although few vapor-phase growth approaches were presented, the proposed procedures required multiple steps, such as matrix deposition and post-conversion, to obtain desired MOF films on substrates. Here, we demonstrate a steam-assisted chemical vapor deposition (CVD) method to directly synthesize highly crystalline ZIF-67 thin films at the temperature
AB - Direct growth of metal–organic frameworks (MOFs) on substrates is a prerequisite to incorporating them into functional platforms and microdevices. Nevertheless, available reports mostly rely on the solvent-based routes, typically altered from processes for powder synthesis which are obstacles to the nanofabrication. Besides, although few vapor-phase growth approaches were presented, the proposed procedures required multiple steps, such as matrix deposition and post-conversion, to obtain desired MOF films on substrates. Here, we demonstrate a steam-assisted chemical vapor deposition (CVD) method to directly synthesize highly crystalline ZIF-67 thin films at the temperature
UR - http://hdl.handle.net/10754/662455
UR - https://pubs.acs.org/doi/10.1021/acsmaterialslett.0c00026
UR - http://www.scopus.com/inward/record.url?scp=85085086529&partnerID=8YFLogxK
U2 - 10.1021/acsmaterialslett.0c00026
DO - 10.1021/acsmaterialslett.0c00026
M3 - Article
SN - 2639-4979
VL - 2
SP - 485
EP - 491
JO - ACS Materials Letters
JF - ACS Materials Letters
IS - 5
ER -