Steam-Assisted Chemical Vapor Deposition of Zeolitic Imidazolate Framework

Jing-Kai Huang, Noboru Saito, Yichen Cai, Yi Wan, Chia-Chin Cheng, Mengliu Li, Junjie Shi, Kaoru Tamada, Vincent Tung, Sean Li, Lain-Jong Li

Research output: Contribution to journalArticlepeer-review

27 Scopus citations


Direct growth of metal–organic frameworks (MOFs) on substrates is a prerequisite to incorporating them into functional platforms and microdevices. Nevertheless, available reports mostly rely on the solvent-based routes, typically altered from processes for powder synthesis which are obstacles to the nanofabrication. Besides, although few vapor-phase growth approaches were presented, the proposed procedures required multiple steps, such as matrix deposition and post-conversion, to obtain desired MOF films on substrates. Here, we demonstrate a steam-assisted chemical vapor deposition (CVD) method to directly synthesize highly crystalline ZIF-67 thin films at the temperature
Original languageEnglish (US)
Pages (from-to)485-491
Number of pages7
JournalACS Materials Letters
Issue number5
StatePublished - Apr 1 2020


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