Fingerprint
Dive into the research topics of 'Strain relaxation in transistor channels with embedded epitaxial silicon germanium source/drain'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Strain relaxation in transistor channels with embedded epitaxial silicon germanium source/drain
J. P. Liu, K. Li, S. M. Pandey, F. L. Benistant, A. See, M. S. Zhou, L. C. Hsia, Ruud Schampers, Dmitri O. Klenov
Research output: Contribution to journal › Article › peer-review
35
Scopus
citations