Abstract
FeN gradient thin films are fabricated by a facing targets sputtering (FTS) system. Rutherford backscattering spectrometry shows that the concentration of Fe atoms or N atoms varies gradually from the substrate to the surface of the film. The FeN gradient films contain crystal phases of δ-Fe2N, ε{lunate}-FexN (2 < x <-3), γ′-Fe4N and α″-Fe16N2 and amorphous FeN as well, according to different sputtering conditions.
Original language | English (US) |
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Pages (from-to) | 719-720 |
Number of pages | 2 |
Journal | Journal of Magnetism and Magnetic Materials |
Volume | 140-144 |
Issue number | PART 1 |
DOIs | |
State | Published - Feb 1995 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics