Structural and magnetic properties of FeN gradient thin films

E. Y. Jiang*, D. C. Sun, H. Liu, H. L. Bai, X. X. Zhang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

FeN gradient thin films are fabricated by a facing targets sputtering (FTS) system. Rutherford backscattering spectrometry shows that the concentration of Fe atoms or N atoms varies gradually from the substrate to the surface of the film. The FeN gradient films contain crystal phases of δ-Fe2N, ε{lunate}-FexN (2 < x <-3), γ′-Fe4N and α″-Fe16N2 and amorphous FeN as well, according to different sputtering conditions.

Original languageEnglish (US)
Pages (from-to)719-720
Number of pages2
JournalJournal of Magnetism and Magnetic Materials
Volume140-144
Issue numberPART 1
DOIs
StatePublished - Feb 1995
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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