Abstract
Self-assembled GaInNAs quantum dots (QD) were fabricated on GaAs (001) substrate by solid source molecular beam epitaxy (SSMBE) equipped with a RF nitrogen plasma source. The surface morphology was investigated using atomic-force microscopy (AFM), and the photoluminescence (PL) of the QDs was measured at low temperature (5K). Through these measurements, the effect of indium and nitrogen compositions on the island density, island size, and optical properties were studied. The experiment was carried out with indium and nitrogen composition ranges of 30%-70% and 0.4%-0.8%, respectively. Using high indium composition, an island density of 1 × 1011/cm2 was obtained in a single layer of GaInNAs QDs. The AFM results showed that the island size of the QDs is in the range of 20-40mn with an average height of 5-16nm and the highest island density of 1×1011/cm2 has been achieved. Low temperature (5K) photoluminescence (PL) wavelength of 1.10 μm to 1.54 μm was detected from these samples.
Original language | English (US) |
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Pages (from-to) | 577-580 |
Number of pages | 4 |
Journal | Conference Proceedings - International Conference on Indium Phosphide and Related Materials |
State | Published - 2002 |
Externally published | Yes |
Event | 14th Indium Phosphide and Related Materials Conference - Stockholm, Sweden Duration: May 12 2002 → May 16 2002 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering