TY - GEN
T1 - Studies on X-ray reflectivity technique and application in thickness measurements in wafer fabrication
AU - Ramesh Rao, N.
AU - Hua, Younan
AU - Li, Kun
AU - Lo, Keng Foo
PY - 2004
Y1 - 2004
N2 - In advanced ULSI technologies, 90nm and beyond, ultra-thin materials play a key role in device performance and its reliability. Conventional optical techniques, which rely on measuring the complex refractive index, do not provide accurate estimate of film thickness for stacks of two or more layers. X-ray reflectivity (XRR) is a reliable method of measuring thickness of composite film stack of total thickness up to 1μm, irrespective of whether it is crystalline or amorphous and, conducting or non-conducting films. In this paper, the results of correlation studies between XRR and TEM are presented. The emphasis is on thickness measurements of different types of films, which are 100Å-15kÅ thick. It will be shown that a good agreement is obtained between the two techniques for film thickness less than 1000Å.
AB - In advanced ULSI technologies, 90nm and beyond, ultra-thin materials play a key role in device performance and its reliability. Conventional optical techniques, which rely on measuring the complex refractive index, do not provide accurate estimate of film thickness for stacks of two or more layers. X-ray reflectivity (XRR) is a reliable method of measuring thickness of composite film stack of total thickness up to 1μm, irrespective of whether it is crystalline or amorphous and, conducting or non-conducting films. In this paper, the results of correlation studies between XRR and TEM are presented. The emphasis is on thickness measurements of different types of films, which are 100Å-15kÅ thick. It will be shown that a good agreement is obtained between the two techniques for film thickness less than 1000Å.
UR - http://www.scopus.com/inward/record.url?scp=51349085523&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:51349085523
SN - 0780386582
SN - 9780780386587
T3 - Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
SP - 94
EP - 97
BT - 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
T2 - 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
Y2 - 4 December 2004 through 9 December 2004
ER -