Study of well adherent DLC film deposited on piezoelectric LiTaO                          3                          substrate

Jingze Tian; Qing Zhang; Q. Zhou; S. F. Yoon; J. Ahn; S. G. Wang; Jingqi Li; D. J. Yang

doi:10.1016/j.apsusc.2004.05.288

Study of well adherent DLC film deposited on piezoelectric LiTaO ₃ substrate

Jingze Tian^*, Qing Zhang, Q. Zhou, S. F. Yoon, J. Ahn, S. G. Wang, Jingqi Li, D. J. Yang

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

A well adherent diamond-like carbon (DLC) film was deposited on piezoelectric LiTaO ₃ substrate using PECVD by inserting SiO ₂ interlayer. DLC film was characterized using Raman spectroscopy and AFM. Physical and mechanical properties were measured using XRR, ellipsometry, scratch test and nano-indentation. The DLC film exhibits the characteristics of hydrogenated amorphous carbon and a very smooth surface with a 0.25 nm RMS. Scratch test shows that critical load (L _c ) is 18 N, which is good enough for applying DLC film to SAW device. The measured mass density, refractive index, hardness and Young's modulus of DLC film deposited on LiTaO ₃ are comparable to the reported values for hydrogenated amorphous carbon film, irrespective of substrates on which the films were deposited.

Original language	English (US)
Pages (from-to)	255-258
Number of pages	4
Journal	Applied Surface Science
Volume	239
Issue number	3-4
DOIs	https://doi.org/10.1016/j.apsusc.2004.05.288
State	Published - Jan 31 2005

Keywords

DLC
Nano-indentation
PECVD
Scratch test

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1016/j.apsusc.2004.05.288

Cite this

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title = " Study of well adherent DLC film deposited on piezoelectric LiTaO 3 substrate ",

abstract = " A well adherent diamond-like carbon (DLC) film was deposited on piezoelectric LiTaO 3 substrate using PECVD by inserting SiO 2 interlayer. DLC film was characterized using Raman spectroscopy and AFM. Physical and mechanical properties were measured using XRR, ellipsometry, scratch test and nano-indentation. The DLC film exhibits the characteristics of hydrogenated amorphous carbon and a very smooth surface with a 0.25 nm RMS. Scratch test shows that critical load (L c ) is 18 N, which is good enough for applying DLC film to SAW device. The measured mass density, refractive index, hardness and Young's modulus of DLC film deposited on LiTaO 3 are comparable to the reported values for hydrogenated amorphous carbon film, irrespective of substrates on which the films were deposited.",

keywords = "DLC, Nano-indentation, PECVD, Scratch test",

author = "Jingze Tian and Qing Zhang and Q. Zhou and Yoon, {S. F.} and J. Ahn and Wang, {S. G.} and Jingqi Li and Yang, {D. J.}",

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T1 - Study of well adherent DLC film deposited on piezoelectric LiTaO 3 substrate

AU - Tian, Jingze

AU - Zhang, Qing

AU - Zhou, Q.

AU - Yoon, S. F.

AU - Ahn, J.

AU - Wang, S. G.

AU - Li, Jingqi

AU - Yang, D. J.

PY - 2005/1/31

Y1 - 2005/1/31

N2 - A well adherent diamond-like carbon (DLC) film was deposited on piezoelectric LiTaO 3 substrate using PECVD by inserting SiO 2 interlayer. DLC film was characterized using Raman spectroscopy and AFM. Physical and mechanical properties were measured using XRR, ellipsometry, scratch test and nano-indentation. The DLC film exhibits the characteristics of hydrogenated amorphous carbon and a very smooth surface with a 0.25 nm RMS. Scratch test shows that critical load (L c ) is 18 N, which is good enough for applying DLC film to SAW device. The measured mass density, refractive index, hardness and Young's modulus of DLC film deposited on LiTaO 3 are comparable to the reported values for hydrogenated amorphous carbon film, irrespective of substrates on which the films were deposited.

AB - A well adherent diamond-like carbon (DLC) film was deposited on piezoelectric LiTaO 3 substrate using PECVD by inserting SiO 2 interlayer. DLC film was characterized using Raman spectroscopy and AFM. Physical and mechanical properties were measured using XRR, ellipsometry, scratch test and nano-indentation. The DLC film exhibits the characteristics of hydrogenated amorphous carbon and a very smooth surface with a 0.25 nm RMS. Scratch test shows that critical load (L c ) is 18 N, which is good enough for applying DLC film to SAW device. The measured mass density, refractive index, hardness and Young's modulus of DLC film deposited on LiTaO 3 are comparable to the reported values for hydrogenated amorphous carbon film, irrespective of substrates on which the films were deposited.

KW - DLC

KW - Nano-indentation

KW - PECVD

KW - Scratch test

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