TY - JOUR
T1 - Surface enhanced thermo lithography
AU - Coluccio, Maria Laura
AU - Alabastri, Alessandro
AU - Bonanni, Simon
AU - Majewska, Roksana
AU - Dattoli, Elisabetta
AU - Barberio, Marianna
AU - Candeloro, Patrizio
AU - Perozziello, Gerardo
AU - Mollace, Vincenzo
AU - Di Fabrizio, Enzo M.
AU - Gentile, Francesco
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work has been partially funded from the Ministry of Health, Italy (Project n. GR-201s0-2320665).
PY - 2017/1/13
Y1 - 2017/1/13
N2 - We used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry.
AB - We used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry.
UR - http://hdl.handle.net/10754/622694
UR - http://www.sciencedirect.com/science/article/pii/S0167931717300047
UR - http://www.scopus.com/inward/record.url?scp=85009792235&partnerID=8YFLogxK
U2 - 10.1016/j.mee.2017.01.004
DO - 10.1016/j.mee.2017.01.004
M3 - Article
SN - 0167-9317
VL - 174
SP - 52
EP - 58
JO - Microelectronic Engineering
JF - Microelectronic Engineering
ER -