Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

Yi Ruei Lin; Hsin Ping Wang; Chin An Lin; Jr Hau He

doi:10.1063/1.3267147

Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

Yi Ruei Lin^*, Hsin Ping Wang, Chin An Lin, Jr Hau He

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

51 Scopus citations

Abstract

We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflection (AR) properties and enhance the hydrophobicity. The effect of surface profiles of periodic NRAs on the AR and hydrophobicity was investigated systematically. The Si NRAs function as both self-cleaning and AR layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.

Original language	English (US)
Article number	114310
Journal	Journal of Applied Physics
Volume	106
Issue number	11
DOIs	https://doi.org/10.1063/1.3267147
State	Published - 2009
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy

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@article{18808ff238e04129bf78915adc46ab71,

title = "Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings",

abstract = "We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflection (AR) properties and enhance the hydrophobicity. The effect of surface profiles of periodic NRAs on the AR and hydrophobicity was investigated systematically. The Si NRAs function as both self-cleaning and AR layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.",

author = "Lin, {Yi Ruei} and Wang, {Hsin Ping} and Lin, {Chin An} and He, {Jr Hau}",

note = "Funding Information: The research was supported by the National Science Council (Grant Nos. NSC 96-2112-M-002-038-MY3 and NSC 96-2622-M-002-002-CC3) and the Aim for Top University Project from the Ministry of Education.",

year = "2009",

doi = "10.1063/1.3267147",

language = "English (US)",

volume = "106",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

number = "11",

}

TY - JOUR

T1 - Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

AU - Lin, Yi Ruei

AU - Wang, Hsin Ping

AU - Lin, Chin An

AU - He, Jr Hau

N1 - Funding Information: The research was supported by the National Science Council (Grant Nos. NSC 96-2112-M-002-038-MY3 and NSC 96-2622-M-002-002-CC3) and the Aim for Top University Project from the Ministry of Education.

PY - 2009

Y1 - 2009

N2 - We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflection (AR) properties and enhance the hydrophobicity. The effect of surface profiles of periodic NRAs on the AR and hydrophobicity was investigated systematically. The Si NRAs function as both self-cleaning and AR layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.

AB - We demonstrate the fabrication of surface profile-controlled close-packed Si nanorod arrays (NRAs), using a scalable and integrated circuit compatible process combining colloidal lithography and reactive ion etching. Si NRAs exhibit broadband, omnidirectional, and polarization-insensitive antireflection (AR) properties and enhance the hydrophobicity. The effect of surface profiles of periodic NRAs on the AR and hydrophobicity was investigated systematically. The Si NRAs function as both self-cleaning and AR layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.

UR - http://www.scopus.com/inward/record.url?scp=72449209716&partnerID=8YFLogxK

U2 - 10.1063/1.3267147

DO - 10.1063/1.3267147

M3 - Article

C2 - 20057938

AN - SCOPUS:72449209716

SN - 0021-8979

VL - 106

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 11

M1 - 114310

ER -

Surface profile-controlled close-packed Si nanorod arrays for self-cleaning antireflection coatings

Abstract

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