Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles

Huawei Li; Yiqiang Fan; David Conchouso Gonzalez; Ian G. Foulds

doi:10.1007/s00542-013-2031-5

Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles

Huawei Li, Yiqiang Fan, David Conchouso Gonzalez, Ian G. Foulds

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

This paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.

Original language	English (US)
Pages (from-to)	445-449
Number of pages	5
Journal	Microsystem Technologies
Volume	21
Issue number	2
DOIs	https://doi.org/10.1007/s00542-013-2031-5
State	Published - Dec 21 2013

ASJC Scopus subject areas

Hardware and Architecture
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering
Condensed Matter Physics

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10.1007/s00542-013-2031-5

Cite this

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title = "Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles",

abstract = "This paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.",

author = "Huawei Li and Yiqiang Fan and {Conchouso Gonzalez}, David and Foulds, {Ian G.}",

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AU - Li, Huawei

AU - Fan, Yiqiang

AU - Conchouso Gonzalez, David

AU - Foulds, Ian G.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2013/12/21

Y1 - 2013/12/21

N2 - This paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.

AB - This paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.

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DO - 10.1007/s00542-013-2031-5

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EP - 449

JO - Microsystem Technologies

JF - Microsystem Technologies

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ER -

Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles

Abstract

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