Systematic investigation of amorphous transition-metal-silicon-nitride electrodes for metal gate CMOS applications

H. C. Wen*, H. N. Alshareef, H. Luan, K. Choi, P. Lysaght, H. R. Harris, C. Huffman, G. A. Brown, G. Bersuker, P. Zeitzoff, H. Huff, P. Majhi, B. H. Lee

*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

28 Scopus citations

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Material Science