Test Structures for Studying Coplanar Reverse-Electrowetting for Vibration Sensing and Energy Harvesting

Anotidaishe Moyo, Muhammad Wakil Shahzad, Jonathan G. Terry, Stewart Smith, Yoshio Mita, Yifan Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Reverse electrowetting on dielectric (REWOD) has emerged to be a promising energy harvesting technology from low frequency vibrations. This study aims to use test structures to characterize a unique form of REWOD using a coplanar electrode configuration. This configuration allows for better versatility in system integration, device packaging and applications.
Original languageEnglish (US)
Title of host publicationIEEE International Conference on Microelectronic Test Structures
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9798350346534
DOIs
StatePublished - Jan 1 2023
Externally publishedYes

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