Keyphrases
Resonator
100%
Dynamic Response
100%
Mechanical Shock
100%
AC Load
60%
DC Load
60%
Shock
40%
Resonant Sensor
20%
Low Pressure
20%
Vacuum Chamber
20%
Electrostatically Actuated
20%
Harmonic Load
20%
Electrostatic Force
20%
Dynamic Pull-in
20%
Single-degree-of-freedom System
20%
Capacitive Sensor
20%
Enhanced Sensitivity
20%
External Disturbances
20%
Combined Influence
20%
Laser Doppler Vibrometer
20%
Shaker
20%
Excitation Condition
20%
Shock Response Spectrum
20%
Shock Load
20%
AC Excitation
20%
Acceleration Pulse
20%
Harmonic Frequency
20%
Shock Duration
20%
Shock Excitation
20%
Parallel-plate Resonator
20%
Engineering
Dynamic Response
100%
Mechanical Shock
100%
Resonator
100%
Harmonics
33%
Resonant Sensor
16%
Simulation Result
16%
Degree of Freedom
16%
Single Degree
16%
Theoretical Investigation
16%
Capacitive
16%
Good Agreement
16%
Experimental Work
16%
Parallel Plate
16%
Experimental Investigation
16%
External Disturbance
16%
Freedom System
16%
Excitation Condition
16%
Electrostatics
16%
Early Experience
16%