TY - GEN
T1 - The dynamics of MEMS arches of non-ideal boundary conditions
AU - Alkharabsheh, Sami A.
AU - Younis, Mohammad I.
PY - 2011
Y1 - 2011
N2 - We present an investigation into the dynamics of MEMS arches when actuated electrically including the effect of their flexible (non-ideal) supports. First, the eigenvalue problem of a nonlinear Euler-Bernoulli shallow arch with torsional and transversal springs at the boundaries is solved analytically. Several results are shown to demonstrate the possibility of tuning the theoretically obtained natural frequencies of an arch to match the experimentally measured. Then, simulation results are shown for the forced vibration response of an arch when excited by a DC electrostatic force superimposed to an AC harmonic load. Shooting technique is utilized to find periodic motions. The stability of the captured periodic motion is examined using the Floquet theory. The results show several jumps in the response during snap-through motion and pull-in. Theoretical and experimental investigations are conducted on a microfabricated curved beam actuated electrically. Results show softening behavior and superharmonic resonances. It is demonstrated that non-ideal boundary conditions can have significant effect on the qualitative dynamical behavior of the MEMS arch, including its natural frequencies, snap-through behavior, and dynamic pull-in.
AB - We present an investigation into the dynamics of MEMS arches when actuated electrically including the effect of their flexible (non-ideal) supports. First, the eigenvalue problem of a nonlinear Euler-Bernoulli shallow arch with torsional and transversal springs at the boundaries is solved analytically. Several results are shown to demonstrate the possibility of tuning the theoretically obtained natural frequencies of an arch to match the experimentally measured. Then, simulation results are shown for the forced vibration response of an arch when excited by a DC electrostatic force superimposed to an AC harmonic load. Shooting technique is utilized to find periodic motions. The stability of the captured periodic motion is examined using the Floquet theory. The results show several jumps in the response during snap-through motion and pull-in. Theoretical and experimental investigations are conducted on a microfabricated curved beam actuated electrically. Results show softening behavior and superharmonic resonances. It is demonstrated that non-ideal boundary conditions can have significant effect on the qualitative dynamical behavior of the MEMS arch, including its natural frequencies, snap-through behavior, and dynamic pull-in.
UR - http://www.scopus.com/inward/record.url?scp=84863605830&partnerID=8YFLogxK
U2 - 10.1115/DETC2011-48501
DO - 10.1115/DETC2011-48501
M3 - Conference contribution
AN - SCOPUS:84863605830
SN - 9780791854846
T3 - Proceedings of the ASME Design Engineering Technical Conference
SP - 197
EP - 207
BT - ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2011
T2 - ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2011
Y2 - 28 August 2011 through 31 August 2011
ER -