@inproceedings{27d6b284c9004800a841e7269168575b,
title = "The effect of squeeze-film damping on suppressing the shock response of MEMS",
abstract = "This paper presents an investigation into the response of a clamped-c lamped microbeam to mechanical shock under the effect of squeeze-film damping (SQFD). In this work, we solve simultaneously the nonlinear Reynolds equation, to model squeeze-film damping, coupled with a nonlinear Euler- Bernoulli beam equation. A Galerkin-based reduced-order model and a finite-deference method (FDM) are utilized for the solid domain and for the fluid domain, respectively. Several results showing the effect of gas pressure on the response of the microbeams are shown. Comparison with the results of a multi- physics nonlinear finite-element model is presented. The results indicate that squeeze-film damping has more significant effect on the response of microstructures in the dynamic shock loads compared to the quasi-static shock loads.",
author = "Hadi Yagubizade and Younis, {Mohammad I.} and Ghader Rezazadeh",
year = "2010",
doi = "10.1115/IMECE2009-12433",
language = "English (US)",
isbn = "9780791843857",
series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings",
publisher = "American Society of Mechanical Engineers (ASME)",
number = "PART A",
pages = "303--308",
booktitle = "Proceedings of the ASME International Mechanical Engineering Congress and Exposition 2009, IMECE 2009",
edition = "PART A",
note = "ASME 2009 International Mechanical Engineering Congress and Exposition, IMECE2009 ; Conference date: 13-11-2009 Through 19-11-2009",
}