## Abstract

The quantification problem of recovering the original material distribution from secondary ion mass spectrometry (SIMS) data is considered in this paper. It is an inverse problem, is ill-posed and hence it requires a special technique for its solution. The quantification problem is essentially an inverse diffusion or (classically) a backward heat conduction problem. In this paper an operator-splitting method (that is proposed in a previous paper by the first author for the solution of inverse diffusion problems) is developed for the solution of the problem of recovering the original structure from the SIMS data. A detailed development of the quantification method is given and it is applied to typical data to demonstrate its effectiveness.

Original language | English (US) |
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Pages (from-to) | 2214-2223 |

Number of pages | 10 |

Journal | Applied Mathematical Modelling |

Volume | 38 |

Issue number | 7-8 |

DOIs | |

State | Published - Jan 1 2014 |

## Keywords

- Atomic mixing
- Inverse diffusion
- Inverse problem
- Quantification
- SIMS

## ASJC Scopus subject areas

- Modeling and Simulation
- Applied Mathematics