In this paper the nucleation mechanism of the facing targets sputtering was studied. Data are presented of the variation of island-density changing with the deposition time and substrate temperature. A simplified treatment of nucleation and growth kinetics has been used to interpret the results.
|Original language||English (US)|
|Number of pages||3|
|Journal||Journal of Magnetism and Magnetic Materials|
|State||Published - Mar 2 1993|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics