TY - GEN
T1 - The static and dynamic behavior of mems arches under electrostatic actuation
AU - Younis, Mohammad I.
AU - Ouakad, Hassen M.
PY - 2009
Y1 - 2009
N2 - In this paper, we investigate the static and dynamic behavior of electrostatically actuated clamped-clamped micromachined arches. The Galerkin method is used to discretize the distributed-parameter model of the considered shallow arch, and thus approximate it by a set of nonlinear algebraic equations and ordinary-differential equations describing its statics and dynamics. Five symmetric mode shapes of either a straight beam or a deformed arch is found to be sufficient to simulate the static and dynamic behavior of the arch. The natural frequencies and mode shapes of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. The results show various nonlinear behaviors, such as hysteresis, softening behavior, and dynamic pull-in. Several scenarios of snap-through and pull-in are shown, which found depend on the initial rise of the arch.
AB - In this paper, we investigate the static and dynamic behavior of electrostatically actuated clamped-clamped micromachined arches. The Galerkin method is used to discretize the distributed-parameter model of the considered shallow arch, and thus approximate it by a set of nonlinear algebraic equations and ordinary-differential equations describing its statics and dynamics. Five symmetric mode shapes of either a straight beam or a deformed arch is found to be sufficient to simulate the static and dynamic behavior of the arch. The natural frequencies and mode shapes of the arch are calculated for various values of DC voltages and initial rises of the arch. The forced vibration response of the arch to a combined DC and AC harmonic load is determined when excited near its fundamental natural frequency. The results show various nonlinear behaviors, such as hysteresis, softening behavior, and dynamic pull-in. Several scenarios of snap-through and pull-in are shown, which found depend on the initial rise of the arch.
UR - http://www.scopus.com/inward/record.url?scp=70449646696&partnerID=8YFLogxK
U2 - 10.1109/ISMA.2009.5164821
DO - 10.1109/ISMA.2009.5164821
M3 - Conference contribution
AN - SCOPUS:70449646696
SN - 9781424434817
T3 - 2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
BT - 2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
T2 - 2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
Y2 - 23 March 2009 through 26 March 2009
ER -