INIS
resonators
100%
investigations
100%
perturbations
75%
damping
75%
stiffness
75%
dynamics
50%
applications
25%
comparative evaluations
25%
environment
25%
silicon
25%
electrodes
25%
voltage
25%
sensitivity
25%
beams
25%
curves
25%
coupling
25%
excitation
25%
eigenvalues
25%
exploitation
25%
Engineering
Localisation
100%
Theoretical Investigation
100%
Experimental Investigation
100%
Coupled System
50%
Electric Potential
25%
Experimental Result
25%
Lumped Parameter
25%
Parameter Model
25%
Frequency Response Curve
25%
Dynamic Behavior
25%
Elements
25%
Applications
25%
Environment
25%
Coupling Strength
25%
Silicon
25%
Microcantilevers
25%
Physics
Microbeam
100%
Position (Location)
100%
Responses
75%
Silicon
25%
Electrodes
25%
Electric Potential
25%
Model
25%
Frequencies
25%
Utilization
25%
Detection
25%
Environment
25%
Parameter
25%
Sides
25%