Theoretical and experimental investigation of the nonlinear response of an electrically actuated imperfect microbeam

Engineering

• Theoretical Investigation 100%
• Experimental Investigation 100%
• Nonlinear Response 100%
• Microfabrication 33%
• Polysilicon 33%
• Simulation Result 33%
• Computer Simulation 33%
• Reduced Order Model 33%
• Primary Resonance 33%
• Nonlinear Phenomenon 33%
• Mechanical Model 33%
• Support Condition 33%
• Harmonics 33%

Keyphrases

• Support Conditions 50%
• Compliant Support 50%