Thermally depolymerizable polycarbonates v. Acid catalyzed thermolysis of allylic and benzylic polycarbonates: A new route to resist imaging

Polymers containing allylic and benzylic carbonate repeating units have been prepared by phase-transfer catalyzed polycondensation of activated bis-carbonates or carbamates and diols. The polymers are highly susceptible to thermal depolymerization and revert to small molecules when heated to temperatures which vary from 140 to 230°mperatures are reduced to well below 100°C if catalytic amounts of acid are added to the polycarbonates. The thermolysis or acidolysis of bis allylic or benzylic carbonates provides a convenient route to aromatic compounds as demonstrated with both models and polymers. The polycarbonates can be used to formulate highly sensitive resist materials with potential for self-development of positive images. Some benzylic polycarbonates which produce polymerizable divinyl monomers upon thermolysis can be used to create negative images in a process which includes both depolymerization and photocrosslinking.