TY - GEN
T1 - Thin Film growth and characterization of Ti doped ZnO by RF/DC magnetron sputtering
AU - Baseer Haider, M.
AU - Al-Kuhaili, Mohammad F.
AU - Durrani, S. M A
AU - Singaravelu, Venkatesh
AU - Roqan, Iman S.
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2015/4/15
Y1 - 2015/4/15
N2 - Thin film Ti doped ZnO (Ti-ZnO) film were grown on sapphire (0001) substrate by RF and DC magnetron sputtering. Films were grown at a substrate temperature of 250 °C with different Ti/Zn concentration. Surface chemical study of the samples was performed by X-ray photoelectron spectroscopy to determine the stoichiometry and Ti/Zn ratio for all samples. Surface morphology of the samples were studied by atomic force microscopy. X-ray diffraction was carried out to determine the crystallinity of the film. No secondary phases of TixOy was observed. We observed a slight increase in the lattice constant with the increase in Ti concentration in ZnO. No ferromagnetic signal was observed for any of the samples. However, some samples showed super-paramagnetic phase. © 2015 Materials Research Society.
AB - Thin film Ti doped ZnO (Ti-ZnO) film were grown on sapphire (0001) substrate by RF and DC magnetron sputtering. Films were grown at a substrate temperature of 250 °C with different Ti/Zn concentration. Surface chemical study of the samples was performed by X-ray photoelectron spectroscopy to determine the stoichiometry and Ti/Zn ratio for all samples. Surface morphology of the samples were studied by atomic force microscopy. X-ray diffraction was carried out to determine the crystallinity of the film. No secondary phases of TixOy was observed. We observed a slight increase in the lattice constant with the increase in Ti concentration in ZnO. No ferromagnetic signal was observed for any of the samples. However, some samples showed super-paramagnetic phase. © 2015 Materials Research Society.
UR - http://hdl.handle.net/10754/594248
UR - https://www.cambridge.org/core/product/identifier/S1946427415003553/type/journal_article
UR - http://www.scopus.com/inward/record.url?scp=84939190170&partnerID=8YFLogxK
U2 - 10.1557/opl.2015.355
DO - 10.1557/opl.2015.355
M3 - Conference contribution
SN - 9781510806122
SP - 55
EP - 60
BT - MRS Proceedings
PB - Cambridge University Press (CUP)
ER -