Thin Film growth and characterization of Ti doped ZnO by RF/DC magnetron sputtering

M. Baseer Haider; Mohammad F. Al-Kuhaili; S. M A Durrani; Venkatesh Singaravelu; Iman S. Roqan

doi:10.1557/opl.2015.355

Thin Film growth and characterization of Ti doped ZnO by RF/DC magnetron sputtering

M. Baseer Haider, Mohammad F. Al-Kuhaili, S. M A Durrani, Venkatesh Singaravelu, Iman S. Roqan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Thin film Ti doped ZnO (Ti-ZnO) film were grown on sapphire (0001) substrate by RF and DC magnetron sputtering. Films were grown at a substrate temperature of 250 °C with different Ti/Zn concentration. Surface chemical study of the samples was performed by X-ray photoelectron spectroscopy to determine the stoichiometry and Ti/Zn ratio for all samples. Surface morphology of the samples were studied by atomic force microscopy. X-ray diffraction was carried out to determine the crystallinity of the film. No secondary phases of TixOy was observed. We observed a slight increase in the lattice constant with the increase in Ti concentration in ZnO. No ferromagnetic signal was observed for any of the samples. However, some samples showed super-paramagnetic phase. © 2015 Materials Research Society.

Original language	English (US)
Title of host publication	MRS Proceedings
Publisher	Cambridge University Press (CUP)
Pages	55-60
Number of pages	6
ISBN (Print)	9781510806122
DOIs	https://doi.org/10.1557/opl.2015.355
State	Published - Apr 15 2015

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title = "Thin Film growth and characterization of Ti doped ZnO by RF/DC magnetron sputtering",

abstract = "Thin film Ti doped ZnO (Ti-ZnO) film were grown on sapphire (0001) substrate by RF and DC magnetron sputtering. Films were grown at a substrate temperature of 250 °C with different Ti/Zn concentration. Surface chemical study of the samples was performed by X-ray photoelectron spectroscopy to determine the stoichiometry and Ti/Zn ratio for all samples. Surface morphology of the samples were studied by atomic force microscopy. X-ray diffraction was carried out to determine the crystallinity of the film. No secondary phases of TixOy was observed. We observed a slight increase in the lattice constant with the increase in Ti concentration in ZnO. No ferromagnetic signal was observed for any of the samples. However, some samples showed super-paramagnetic phase. {\textcopyright} 2015 Materials Research Society.",

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AU - Baseer Haider, M.

AU - Al-Kuhaili, Mohammad F.

AU - Durrani, S. M A

AU - Singaravelu, Venkatesh

AU - Roqan, Iman S.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2015/4/15

Y1 - 2015/4/15

N2 - Thin film Ti doped ZnO (Ti-ZnO) film were grown on sapphire (0001) substrate by RF and DC magnetron sputtering. Films were grown at a substrate temperature of 250 °C with different Ti/Zn concentration. Surface chemical study of the samples was performed by X-ray photoelectron spectroscopy to determine the stoichiometry and Ti/Zn ratio for all samples. Surface morphology of the samples were studied by atomic force microscopy. X-ray diffraction was carried out to determine the crystallinity of the film. No secondary phases of TixOy was observed. We observed a slight increase in the lattice constant with the increase in Ti concentration in ZnO. No ferromagnetic signal was observed for any of the samples. However, some samples showed super-paramagnetic phase. © 2015 Materials Research Society.

AB - Thin film Ti doped ZnO (Ti-ZnO) film were grown on sapphire (0001) substrate by RF and DC magnetron sputtering. Films were grown at a substrate temperature of 250 °C with different Ti/Zn concentration. Surface chemical study of the samples was performed by X-ray photoelectron spectroscopy to determine the stoichiometry and Ti/Zn ratio for all samples. Surface morphology of the samples were studied by atomic force microscopy. X-ray diffraction was carried out to determine the crystallinity of the film. No secondary phases of TixOy was observed. We observed a slight increase in the lattice constant with the increase in Ti concentration in ZnO. No ferromagnetic signal was observed for any of the samples. However, some samples showed super-paramagnetic phase. © 2015 Materials Research Society.

UR - http://hdl.handle.net/10754/594248

UR - https://www.cambridge.org/core/product/identifier/S1946427415003553/type/journal_article

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U2 - 10.1557/opl.2015.355

DO - 10.1557/opl.2015.355

M3 - Conference contribution

SN - 9781510806122

SP - 55

EP - 60

BT - MRS Proceedings

PB - Cambridge University Press (CUP)

ER -

Thin Film growth and characterization of Ti doped ZnO by RF/DC magnetron sputtering

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