Thinning and functionalization of few-layer graphene sheets by CF4 plasma treatment

Chao Shen, Ronggen Cao, Yingchun Cheng, Fei Ding, Gaoshan Huang, Yongfeng Mei, Udo Schwingenschlögl

Research output: Contribution to journalArticlepeer-review

24 Scopus citations


Structural changes of few-layer graphene sheets induced by CF4 plasma treatment are studied by optical microscopy and Raman spectroscopy, together with theoretical simulation. Experimental results suggest a thickness reduction of few-layer graphene sheets subjected to prolonged CF4 plasma treatment while plasma treatment with short time only leads to fluorine functionalization on the surface layer by formation of covalent bonds. Raman spectra reveal an increase in disorder by physical disruption of the graphene lattice as well as functionalization during the plasma treatment. The F/CF3 adsorption and the lattice distortion produced are proved by theoretical simulation using density functional theory, which also predicts p-type doping and Dirac cone splitting in CF4 plasma-treated graphene sheets that may have potential in future graphene-based micro/nanodevices.
Original languageEnglish (US)
Pages (from-to)268
JournalNanoscale Research Letters
Issue number1
StatePublished - Jun 1 2012


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