Tomography experiment of an integrated circuit specimen using 3 MeV electrons in the transmission electron microscope

Hai Bo Zhang, Xiang Liang Zhang, Yong Wang, Akio Takaoka

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Fingerprint

Dive into the research topics of 'Tomography experiment of an integrated circuit specimen using 3 MeV electrons in the transmission electron microscope'. Together they form a unique fingerprint.

Engineering

Physics

Material Science

Keyphrases