Fingerprint
Dive into the research topics of 'Topography study on 45nm CuCMP low-k process and its impact on defectivity and resistance'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Feng Zhao*, Benfu Lin, Hong Yu, San Leong Lup, Bin Wang Xian, Mei Sheng Zhou, Haigou Huang, Hong Wu, Fan Zhang, Jun Chen, Chao Zhang Bei
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review