Toward high resolution and high efficiency Zone Plate for X-ray applications

E Di Fabrizio; F Romanato; M Gentili

doi:10.1063/1.1291223

Toward high resolution and high efficiency Zone Plate for X-ray applications

E Di Fabrizio^*, F Romanato, M Gentili

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

High resolution and high efficiency Zone Plate for X-rays in the energy range of 300 eV and 12 KeV fabricated by means of electron beam and X-ray lithography are presented. Regarding the high resolution issue gold zone plate with 70 nm resolution and thickness of 0.4 mum are shown. When the efficiency is more important, multilevel zone plate can provide an increase of the first diffraction order while suppressing higher ones. The optical test of four level zone plate made by Gold or Nickel was performed at the European Synchrotron Radiation Facility, beamline ID21. At 7 KeV an efficiency of 55% was measured.

Original language	English
Title of host publication	X-RAY MICROSCOPY, PROCEEDINGS
Editors	W MeyerIlse, T Warwick, D Attwood
Publisher	AMER INST PHYSICS
Pages	635-640
Number of pages	6
ISBN (Print)	1-56396-926-2
DOIs	https://doi.org/10.1063/1.1291223
State	Published - 2000
Externally published	Yes
Event	6th International Conference on X-Ray Microscopy - BERKELEY, Canada Duration: Aug 2 1999 → Aug 6 1999

Publication series

Name	AIP CONFERENCE PROCEEDINGS
Publisher	AMER INST PHYSICS
Volume	507
ISSN (Print)	0094-243X

Conference

Conference	6th International Conference on X-Ray Microscopy
Country/Territory	Canada
City	BERKELEY
Period	08/2/99 → 08/6/99

Keywords

LITHOGRAPHY

Access to Document

10.1063/1.1291223

http://aip.scitation.org/doi/abs/10.1063/1.1291223

Cite this

@inproceedings{e6eeee5670264d6189e72058214a3c54,

title = "Toward high resolution and high efficiency Zone Plate for X-ray applications",

abstract = "High resolution and high efficiency Zone Plate for X-rays in the energy range of 300 eV and 12 KeV fabricated by means of electron beam and X-ray lithography are presented. Regarding the high resolution issue gold zone plate with 70 nm resolution and thickness of 0.4 mum are shown. When the efficiency is more important, multilevel zone plate can provide an increase of the first diffraction order while suppressing higher ones. The optical test of four level zone plate made by Gold or Nickel was performed at the European Synchrotron Radiation Facility, beamline ID21. At 7 KeV an efficiency of 55% was measured.",

keywords = "LITHOGRAPHY",

author = "{Di Fabrizio}, E and F Romanato and M Gentili",

year = "2000",

doi = "10.1063/1.1291223",

language = "English",

isbn = "1-56396-926-2",

series = "AIP CONFERENCE PROCEEDINGS",

publisher = "AMER INST PHYSICS",

pages = "635--640",

editor = "W MeyerIlse and T Warwick and D Attwood",

booktitle = "X-RAY MICROSCOPY, PROCEEDINGS",

note = "6th International Conference on X-Ray Microscopy ; Conference date: 02-08-1999 Through 06-08-1999",

}

Di Fabrizio, E, Romanato, F & Gentili, M 2000, Toward high resolution and high efficiency Zone Plate for X-ray applications. in W MeyerIlse, T Warwick & D Attwood (eds), X-RAY MICROSCOPY, PROCEEDINGS. AIP CONFERENCE PROCEEDINGS, vol. 507, AMER INST PHYSICS, pp. 635-640, 6th International Conference on X-Ray Microscopy, BERKELEY, Canada, 08/2/99. https://doi.org/10.1063/1.1291223

Toward high resolution and high efficiency Zone Plate for X-ray applications. / Di Fabrizio, E; Romanato, F; Gentili, M.
X-RAY MICROSCOPY, PROCEEDINGS. ed. / W MeyerIlse; T Warwick; D Attwood. AMER INST PHYSICS, 2000. p. 635-640 (AIP CONFERENCE PROCEEDINGS; Vol. 507).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Toward high resolution and high efficiency Zone Plate for X-ray applications

AU - Di Fabrizio, E

AU - Romanato, F

AU - Gentili, M

PY - 2000

Y1 - 2000

N2 - High resolution and high efficiency Zone Plate for X-rays in the energy range of 300 eV and 12 KeV fabricated by means of electron beam and X-ray lithography are presented. Regarding the high resolution issue gold zone plate with 70 nm resolution and thickness of 0.4 mum are shown. When the efficiency is more important, multilevel zone plate can provide an increase of the first diffraction order while suppressing higher ones. The optical test of four level zone plate made by Gold or Nickel was performed at the European Synchrotron Radiation Facility, beamline ID21. At 7 KeV an efficiency of 55% was measured.

AB - High resolution and high efficiency Zone Plate for X-rays in the energy range of 300 eV and 12 KeV fabricated by means of electron beam and X-ray lithography are presented. Regarding the high resolution issue gold zone plate with 70 nm resolution and thickness of 0.4 mum are shown. When the efficiency is more important, multilevel zone plate can provide an increase of the first diffraction order while suppressing higher ones. The optical test of four level zone plate made by Gold or Nickel was performed at the European Synchrotron Radiation Facility, beamline ID21. At 7 KeV an efficiency of 55% was measured.

KW - LITHOGRAPHY

U2 - 10.1063/1.1291223

DO - 10.1063/1.1291223

M3 - Conference contribution

SN - 1-56396-926-2

T3 - AIP CONFERENCE PROCEEDINGS

SP - 635

EP - 640

BT - X-RAY MICROSCOPY, PROCEEDINGS

A2 - MeyerIlse, W

A2 - Warwick, T

A2 - Attwood, D

PB - AMER INST PHYSICS

T2 - 6th International Conference on X-Ray Microscopy

Y2 - 2 August 1999 through 6 August 1999

ER -

Toward high resolution and high efficiency Zone Plate for X-ray applications

Abstract

Publication series

Conference

Keywords

Access to Document

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Cite this