TY - JOUR
T1 - Ultra-high resolution optical coherence tomography for encapsulation quality inspection
AU - Czajkowski, Jakub
AU - Fabritius, Tapio E J
AU - Ulański, Jacek P.
AU - Marszałek, Tomasz
AU - Gazicki-Lipman, Maciej
AU - Nosal, Andrzej
AU - Śliz, Rafal
AU - Alarousu, Erkki
AU - Prykäri, Tuukka
AU - Myllylä̈, Risto Antero
AU - Jabbour, Ghassan E.
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: Presented study was done within PolyNet project and has been funded from the European Community's Seventh Framework Programme (FP7/2007-2013) under the grant agreement No. 214006. In addition, the authors would like to thank the Academy of Finland for the support in their research on UHR-OCT.
PY - 2011/8/28
Y1 - 2011/8/28
N2 - We present the application of ultra-high resolution optical coherence tomography (UHR-OCT) in evaluation of thin, protective films used in printed electronics. Two types of sample were investigated: microscopy glass and organic field effect transistor (OFET) structure. Samples were coated with thin (1-3 μm) layer of parylene C polymer. Measurements were done using experimental UHR-OCT device based on a Kerr-lens mode locked Ti: sapphire femtosecond laser, photonic crystal fibre and modified, free-space Michelson interferometer. Submicron resolution offered by the UHR-OCT system applied in the study enables registration of both interfaces of the thin encapsulation layer. Complete, volumetric characterisation of protective layers is presented, demonstrating possibility to use OCT for encapsulation quality inspection. © Springer-Verlag 2011.
AB - We present the application of ultra-high resolution optical coherence tomography (UHR-OCT) in evaluation of thin, protective films used in printed electronics. Two types of sample were investigated: microscopy glass and organic field effect transistor (OFET) structure. Samples were coated with thin (1-3 μm) layer of parylene C polymer. Measurements were done using experimental UHR-OCT device based on a Kerr-lens mode locked Ti: sapphire femtosecond laser, photonic crystal fibre and modified, free-space Michelson interferometer. Submicron resolution offered by the UHR-OCT system applied in the study enables registration of both interfaces of the thin encapsulation layer. Complete, volumetric characterisation of protective layers is presented, demonstrating possibility to use OCT for encapsulation quality inspection. © Springer-Verlag 2011.
UR - http://hdl.handle.net/10754/564419
UR - http://link.springer.com/10.1007/s00340-011-4699-5
UR - http://www.scopus.com/inward/record.url?scp=84859698674&partnerID=8YFLogxK
U2 - 10.1007/s00340-011-4699-5
DO - 10.1007/s00340-011-4699-5
M3 - Article
SN - 0946-2171
VL - 105
SP - 649
EP - 657
JO - Applied Physics B
JF - Applied Physics B
IS - 3
ER -