Wide-band transmittance of one-dimensional photonic crystals carved in Si3 N4 Si O2 channel waveguides

D. Gerace; M. Galli; D. Bajoni; G. Guizzetti; L. C. Andreani; F. Riboli; M. Melchiorri; N. Daldosso; L. Pavesi; G. Pucker; S. Cabrini; L. Businaro; E. Di Fabrizio

doi:10.1063/1.2135408

Wide-band transmittance of one-dimensional photonic crystals carved in Si3 N4 Si O2 channel waveguides

D. Gerace^*, M. Galli, D. Bajoni, G. Guizzetti, L. C. Andreani, F. Riboli, M. Melchiorri, N. Daldosso, L. Pavesi, G. Pucker, S. Cabrini, L. Businaro, E. Di Fabrizio

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

Experimental and theoretical investigations of photonic crystal (PhC) structures in silicon nitride/silicon dioxide (Si3 N4 Si O2) vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3 N4 Si O2 -based PhC waveguides for photonics applications from the infrared up to the visible range.

Original language	English (US)
Article number	211116
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	87
Issue number	21
DOIs	https://doi.org/10.1063/1.2135408
State	Published - 2005
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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Gerace, D., Galli, M., Bajoni, D., Guizzetti, G., Andreani, L. C., Riboli, F., Melchiorri, M., Daldosso, N., Pavesi, L., Pucker, G., Cabrini, S., Businaro, L., & Di Fabrizio, E. (2005). Wide-band transmittance of one-dimensional photonic crystals carved in Si3 N4 Si O2 channel waveguides. Applied Physics Letters, 87(21), 1-3. Article 211116. https://doi.org/10.1063/1.2135408

@article{bf8911aba37645b4b65d96090a4f9b89,

title = "Wide-band transmittance of one-dimensional photonic crystals carved in Si3 N4 Si O2 channel waveguides",

abstract = "Experimental and theoretical investigations of photonic crystal (PhC) structures in silicon nitride/silicon dioxide (Si3 N4 Si O2) vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3 N4 Si O2 -based PhC waveguides for photonics applications from the infrared up to the visible range.",

author = "D. Gerace and M. Galli and D. Bajoni and G. Guizzetti and Andreani, {L. C.} and F. Riboli and M. Melchiorri and N. Daldosso and L. Pavesi and G. Pucker and S. Cabrini and L. Businaro and {Di Fabrizio}, E.",

note = "Funding Information: This work was supported by Ministero dell{\textquoteright}Istruzione, dell{\textquoteright}Universit{\`a} e della Ricerca (MIUR) through Cofin Program “Silicon-based photonic crystals,” by Fondazione Banca del Monte di Lombardia, and by Provincia Autonoma di Trento (PAT) through PROFILL Project.",

year = "2005",

doi = "10.1063/1.2135408",

language = "English (US)",

volume = "87",

pages = "1--3",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "AMER INST PHYSICS",

number = "21",

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TY - JOUR

T1 - Wide-band transmittance of one-dimensional photonic crystals carved in Si3 N4 Si O2 channel waveguides

AU - Gerace, D.

AU - Galli, M.

AU - Bajoni, D.

AU - Guizzetti, G.

AU - Andreani, L. C.

AU - Riboli, F.

AU - Melchiorri, M.

AU - Daldosso, N.

AU - Pavesi, L.

AU - Pucker, G.

AU - Cabrini, S.

AU - Businaro, L.

AU - Di Fabrizio, E.

N1 - Funding Information: This work was supported by Ministero dell’Istruzione, dell’Università e della Ricerca (MIUR) through Cofin Program “Silicon-based photonic crystals,” by Fondazione Banca del Monte di Lombardia, and by Provincia Autonoma di Trento (PAT) through PROFILL Project.

PY - 2005

Y1 - 2005

N2 - Experimental and theoretical investigations of photonic crystal (PhC) structures in silicon nitride/silicon dioxide (Si3 N4 Si O2) vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3 N4 Si O2 -based PhC waveguides for photonics applications from the infrared up to the visible range.

AB - Experimental and theoretical investigations of photonic crystal (PhC) structures in silicon nitride/silicon dioxide (Si3 N4 Si O2) vertical waveguiding geometry are reported. One-dimensional patterns, either periodic or with cavity layers, are carved onto the channel waveguides by using focused ion beam lithography. Broadband transmittance spectroscopy in the visible and near-infrared frequency ranges is employed to show photonic band gap behavior up to the fourth order. For structures with a cavity layer, resonant peaks appear in transmittance spectra within the photonic gaps, in agreement with theory. The results show the interest of Si3 N4 Si O2 -based PhC waveguides for photonics applications from the infrared up to the visible range.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Wide-band transmittance of one-dimensional photonic crystals carved in Si3 N4 Si O2 channel waveguides

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