X-ray lithography for micro-and nano-fabrication at ELETTRA for interdisciplinary applications

E. Di Fabrizio, R. Fillipo, S. Cabrini, R. Kumar^*, F. Perennes, M. Altissimo, L. Businaro, D. Cojac, L. Vaccari, M. Prasciolu, P. Candeloro

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review