XPS analysis of the interface of ceramic thin films for humidity sensors

Giulia Mattogno*, Guido Righini, Giampiero Montesperelli, Enrico Traversa

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

44 Scopus citations


MgAl2O4 thin films, deposited on Si/SiO2 substrates, were studied as humidity sensors. This paper discusses the evaluation of the chemical composition at increasing depths, carried out by a combination of Ar+ ion etching and XPS analysis. These analyses showed the simultaneous presence of Mg, Al and Si at the film/substrate interface. The thickness of the interfaces were calculated between 7 and 10 nm. The shift in the binding energies of the XPS peaks observed at the interface seems to demonstrate the occurrence of a chemical interaction between film and substrate. At the interface, Si 2p binding energy values are characteristic of a silicate, and this effect may be responsible for the good adhesive properties of MgAl2O4 films to silica, as demonstrated by peel tests with Scotch tape.

Original languageEnglish (US)
Pages (from-to)363-366
Number of pages4
JournalApplied Surface Science
Issue numberPART 1
StatePublished - Jun 2 1993

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics


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